Development of a comprehensive metrology platform dedicated to dimensional measurements of CD atomic force microscopy tips

2015 ◽  
Author(s):  
Johann Foucher ◽  
Sebastian W. Schmidt ◽  
Aurelien Labrosse ◽  
Alexandre Dervillé ◽  
Sandra Bos ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Force Microscopy ◽  
Atomic Force ◽  
Dimensional Measurements

scholarly journals Evaluation of preparation methods for suspended nano-objects on substrates for dimensional measurements by atomic force microscopy

2017 ◽  
Vol 8 ◽  
pp. 1774-1785
Author(s):  
Petra Fiala ◽  
Daniel Göhler ◽  
Benno Wessely ◽  
Michael Stintz ◽  
Giovanni Mattia Lazzerini ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Membrane Filtration ◽  
Dip Coating ◽  
Preparation Methods ◽  
Force Microscopy ◽  
Atomic Force ◽  
Dimensional Measurements ◽  
Drop Drying ◽  
Particle Preparation ◽  
Specific Particle

Dimensional measurements on nano-objects by atomic force microscopy (AFM) require samples of safely fixed and well individualized particles with a suitable surface-specific particle number on flat and clean substrates. Several known and proven particle preparation methods, i.e., membrane filtration, drying, rinsing, dip coating as well as electrostatic and thermal precipitation, were performed by means of scanning electron microscopy to examine their suitability for preparing samples for dimensional AFM measurements. Different suspensions of nano-objects (with varying material, size and shape) stabilized in aqueous solutions were prepared therefore on different flat substrates. The drop-drying method was found to be the most suitable one for the analysed suspensions, because it does not require expensive dedicated equipment and led to a uniform local distribution of individualized nano-objects. Traceable AFM measurements based on Si and SiO2 coated substrates confirmed the suitability of this technique.

Error Sources in Atomic Force Microscopy for Dimensional Measurements: Taxonomy and Modeling

2010 ◽  
Vol 132 (3) ◽  
Author(s):  
F. Marinello ◽  
S. Carmignato ◽  
A. Voltan ◽  
E. Savio ◽  
L. De Chiffre
Keyword(s):  
Mathematical Model ◽  
Atomic Force Microscopy ◽  
Scanning System ◽  
Thermal Drift ◽  
Scaling Effects ◽  
Error Sources ◽  
Force Microscopy ◽  
Atomic Force ◽  
Dimensional Measurements ◽  
Squareness Errors

This paper aimed at identifying the error sources that occur in dimensional measurements performed using atomic force microscopy. In particular, a set of characterization techniques for errors quantification is presented. The discussion on error sources is organized in four main categories: scanning system, tip-surface interaction, environment, and data processing. The discussed errors include scaling effects, squareness errors, hysteresis, creep, tip convolution, and thermal drift. A mathematical model of the measurement system is eventually described, as a reference basis for errors characterization, with an applicative example on a reference silicon grating.

Electrostatic Forces on the Surface of Metals as Measured by Atomic Force Microscopy

2000 ◽  
Vol 10 (1-2) ◽  
pp. 15
Author(s):  
Eugene Sprague ◽  
Julio C. Palmaz ◽  
Cristina Simon ◽  
Aaron Watson
Keyword(s):  
Atomic Force Microscopy ◽  
Electrostatic Forces ◽  
Force Microscopy ◽  
Atomic Force
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