Ammonothermal growth of polar and non-polar bulk GaN crystal

Author(s):  
Yutaka Mikawa ◽  
Takayuki Ishinabe ◽  
Shinichiro Kawabata ◽  
Tae Mochizuki ◽  
Atsuhiko Kojima ◽  
...  
1997 ◽  
Vol 482 ◽  
Author(s):  
A. Usui

AbstractA new approach to grow thick GaN layers by hydride vapor phase epitaxy (HVPE) is described. Selective growth is carried out at the beginning of growth. The coalescence of selectively grown facet structures makes it possible to achieve a flat surface over the entire substrate. As a result, crack-free GaN films with mirror-like surfaces are successfully grown even to a thickness of about 100 μm on a 2-inch-diameter sapphire substrate. The extended defect density is as low as 6×107 cm−2. The reduction mechanism for dislocation is discussed based on TEM observation. The high optical properties of FIELO GaN are confirmed by 5 K photoluminescence and reflectance measurements.


2011 ◽  
Vol 37 (2-5) ◽  
pp. 467-477 ◽  
Author(s):  
Qi-Sheng Chen ◽  
Yan-Ni Jiang ◽  
Jun-Yi Yan ◽  
Wei Li ◽  
V. Prasad

RSC Advances ◽  
2015 ◽  
Vol 5 (63) ◽  
pp. 51201-51207 ◽  
Author(s):  
Lin Shang ◽  
Taiping Lu ◽  
Guangmei Zhai ◽  
Zhigang Jia ◽  
Hua Zhang ◽  
...  

The role of the nucleation layer thickness on the GaN crystal quality grown by metal organic chemical vapor deposition is explored.


2013 ◽  
Author(s):  
Y. Mori ◽  
M. Imade ◽  
M. Maruyama ◽  
M. Yoshimura
Keyword(s):  
Bulk Gan ◽  

2008 ◽  
Vol 600-603 ◽  
pp. 1245-1250 ◽  
Author(s):  
Fumio Kawamura ◽  
Hidekazu Umeda ◽  
Masanori Morishita ◽  
Ryohei Gejo ◽  
Masaki Tanpo ◽  
...  

We succeeded in growing a GaN single crystal substrate with diameter of about two inches using the Na flux method. Our success is due to the development of a new apparatus for growing large GaN single crystals. The crystal grown in this study has a low dislocation density of 2.3×105 (cm-2), The secondary ion mass spectrometry (SIMS) technique demonstrates that the Na element is difficult to be taken in the crystal in both the + and – c directions, resulting in a Na concentration of 4.2 × 1014 (cm-3) in the crystal. Our success in growing a two-inch GaN substrate with a low impurity content and low dislocation density should pave the way for the Na flux method to become a practical application.


2002 ◽  
Vol 41 (Part 1, No. 8) ◽  
pp. 5034-5037 ◽  
Author(s):  
Masaru Kamano ◽  
Masanobu Haraguchi ◽  
Takahiro Niwaki ◽  
Masuo Fukui ◽  
Minoru Kuwahara ◽  
...  

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