Comparison of iterative wavefront reconstruction algorithms for high-resolution adaptive optics systems

2014 ◽  
Author(s):  
Shengyi Cheng ◽  
Lizhi Dong ◽  
Shanqiu Chen ◽  
Ping Yang ◽  
Mingwu Ao ◽  
...  
Keyword(s):  
High Resolution ◽  
Adaptive Optics ◽  
Reconstruction Algorithms ◽  
Wavefront Reconstruction

X-Ray Nanotomography (XRMT) Tool for Non-Destructive High-Resolution Imaging of ICs

2001 ◽  
Author(s):  
Wenbing Yun ◽  
Steve Wang ◽  
David Scott ◽  
Kenneth W. Nill ◽  
Waleed S. Haddad
Keyword(s):  
High Resolution ◽  
Process Development ◽  
3D Visualization ◽  
Tomographic Reconstruction ◽  
Reconstruction Algorithms ◽  
X Ray ◽  
Visualization Software ◽  
Volumetric Reconstruction ◽  
Resolution Imaging ◽  
Non Destructive

Abstract A high-resolution table-sized x-ray nanotomography (XRMT) tool has been constructed that shows the promise of nondestructively imaging the internal structure of a full IC stack with a spatial resolution better than 100 nm. Such a tool can be used to detect, localize, and characterize buried defects in the IC. By collecting a set of X-ray projections through the full IC (which may include tens of micrometers of silicon substrate and several layers of Cu interconnects) and applying tomographic reconstruction algorithms to these projections, a 3D volumetric reconstruction can be obtained, and analyzed for defects using 3D visualization software. XRMT is a powerful technique that will find use in failure analysis and IC process development, and may facilitate or supplant investigations using SEM, TEM, and FIB tools, which generally require destructive sample preparation and a vacuum environment.

scholarly journals Improved Wavefront Reconstruction and Correction Strategy for Adaptive Optics System with a Plenoptic Sensor

2021 ◽  
pp. 1-1
Author(s):  
Jintian Hu ◽  
Chen Tao ◽  
Xudong Lin ◽  
Liang Wang ◽  
Qichang An ◽  
...  
Keyword(s):  
Adaptive Optics ◽  
Wavefront Reconstruction ◽  
Adaptive Optics System
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