Simultaneous phase-shifting interferometry study based on the common-path Fizeau interferometer

2014 ◽  
Author(s):  
Feng-wei Liu ◽  
Yong-qian Wu
Keyword(s):  
Phase Shifting ◽  
Fizeau Interferometer ◽  
Common Path ◽  
Phase Shifting Interferometry ◽  
The Common

Double aperture common-path phase-shifting interferometry by translating a ruling at the input plane

2013 ◽  
Vol 38 (11) ◽  
pp. 1850 ◽  
Author(s):  
Cruz Meneses-Fabian ◽  
Rosaura Kantun-Montiel ◽  
Gildardo-Pablo Lemus-Alonso ◽  
Uriel Rivera-Ortega
Keyword(s):  
Phase Shifting ◽  
Common Path ◽  
Phase Shifting Interferometry ◽  
Input Plane

Fizeau interferometer for phase shifting interferometry in ultrahigh vacuum

2001 ◽  
Vol 72 (9) ◽  
pp. 3726-3727 ◽  
Author(s):  
S. Kaiser ◽  
T. Maier ◽  
A. Grossmann ◽  
C. Zimmermann
Keyword(s):  
Ultrahigh Vacuum ◽  
Phase Shifting ◽  
Fizeau Interferometer ◽  
Phase Shifting Interferometry

scholarly journals In Situ Metrology for Pad Surface Monitoring in CMP Using a Common-Path Phase-Shifting Interferometry: A Feasibility Study

2021 ◽  
Vol 11 (15) ◽  
pp. 6839
Author(s):  
Eun-Soo Kim ◽  
Woo-June Choi
Keyword(s):  
External Perturbation ◽  
Phase Shifting ◽  
Surface Topology ◽  
Surface Mapping ◽  
Common Path ◽  
Phase Shifting Interferometry ◽  
Interference Signals ◽  
Planarization Process ◽  
In Situ Metrology

In the fabrication of semiconductors, chemical mechanical polishing (CMP) is an essential wafer-planarization process. For optimal CMP, it is crucial to monitor the texture of the polishing pad; this leads to homogenous planarization of wafers. Hence, we present a new interferometric approach for in situ evaluation of the CMP pad surface based on a common-path phase-shifting interferometry, with which a series of phase-modulated interference signals immune to external perturbation can be recorded. A nanoscopic surface topology can then be reconstructed to estimate surface roughness using the recorded interference images. The surface mapping performance of the proposed method was tested by retrieving a topology of a vibrating nanostructure in immersion, of which height profiles were consistent with the result from atomic force microscopy (AFM). The method was also validated by examining the surface of a used CMP pad in simulated conditions.

Phase-shifting interferometry with uncalibrated phase shifts

2000 ◽  
Vol 39 (4) ◽  
pp. 585 ◽  
Author(s):  
Xin Chen ◽  
Maureen Gramaglia ◽  
John A. Yeazell
Keyword(s):  
Phase Shifts ◽  
Phase Shifting ◽  
Phase Shifting Interferometry
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