Linear thin-film position-sensitive detector (LTFPSD) for 3D measurements

1995 ◽  
Author(s):  
Rodrigo Martins ◽  
Guilherme Lavareda ◽  
Elvira Fortunato ◽  
Fernando Soares ◽  
Luis Fernandes ◽  
...  
Keyword(s):  
Thin Film ◽  
Position Sensitive Detector ◽  
Sensitive Detector ◽  
3D Measurements ◽  
Position Sensitive

A linear array thin film position sensitive detector for 3D measurements

1996 ◽  
Vol 198-200 ◽  
pp. 1212-1216 ◽  
Author(s):  
E. Fortunato ◽  
F. Soares ◽  
G. Lavareda ◽  
R. Martins
Keyword(s):  
Thin Film ◽  
Linear Array ◽  
Position Sensitive Detector ◽  
Sensitive Detector ◽  
3D Measurements ◽  
Position Sensitive

Characteristics of a linear array of a-Si:H thin film position sensitive detector

1999 ◽  
Vol 337 (1-2) ◽  
pp. 222-225 ◽  
Author(s):  
E Fortunato ◽  
F Soares ◽  
P Teodoro ◽  
N Guimarães ◽  
M Mendes ◽  
...  
Keyword(s):  
Thin Film ◽  
Linear Array ◽  
Position Sensitive Detector ◽  
Sensitive Detector ◽  
Position Sensitive

A New Linear Array Thin Film Position Sensitive Detector (LTFPSD) for 3D Measurements

1995 ◽  
Vol 377 ◽  
Author(s):  
E. Fortunato ◽  
F. Soares ◽  
G. Lavareda ◽  
R. Martins
Keyword(s):  
Thin Film ◽  
Linear Array ◽  
Low Complexity ◽  
Position Sensitive Detector ◽  
Sensitive Detector ◽  
Optical Inspection ◽  
Position Sensitive ◽  
First Time ◽  
Hydrogenated Amorphous ◽  
Cross Section Method

ABSTRACTA Linear array Thin Film Position Sensitive Detector (LTFPSD) based on hydrogenated amorphous silicon (a-Si:H) is proposed for the first time, taking advantage of the optical properties presented by a-Si:H devices we have developed a LTFPSD with 128 integrated elements able to be used in 3D inspections/measurements. Each element consists on an one-dimensional TFPSD, based on a p.i.n diode produced in a conventional PECVD system, where the doped layers are coated with thin resistive layers to establish the required device equipotentials. By proper incorporation of the LTFPSD into an optical inspection camera it will be possible to acquire information about an object/surface, through the optical cross-section method1. The main advantages of this system, when compared with the conventional CCDs, are the low complexity of hardware and software used and that the information can be continuously processed (analogue detection).

New ultra-light flexible large area thin film position sensitive detector based on amorphous silicon

2000 ◽  
Vol 266-269 ◽  
pp. 1213-1217 ◽  
Author(s):  
E. Fortunato ◽  
I. Ferreira ◽  
F. Giuliani ◽  
P. Wurmsdobler ◽  
R. Martins
Keyword(s):  
Thin Film ◽  
Amorphous Silicon ◽  
Position Sensitive Detector ◽  
Sensitive Detector ◽  
Large Area ◽  
Position Sensitive

Thin film position sensitive detector based on amorphous silicon p–i–n diode

1994 ◽  
Vol 65 (12) ◽  
pp. 3784-3786 ◽  
Author(s):  
Elvira Fortunato ◽  
Guilherme Lavareda ◽  
Manuela Vieira ◽  
Rodrigo Martins
Keyword(s):  
Thin Film ◽  
Amorphous Silicon ◽  
Position Sensitive Detector ◽  
Sensitive Detector ◽  
Position Sensitive

Application of Amorphous Silicon Thin-Film Position-Sensitive Detector to Optical Rules

2001 ◽  
Vol 3 (3) ◽  
pp. 174-177 ◽  
Author(s):  
R. Martins ◽  
P. Teodoro ◽  
F. Soares ◽  
I. Ferreira ◽  
N. Guimarães ◽  
...  
Keyword(s):  
Thin Film ◽  
Amorphous Silicon ◽  
Position Sensitive Detector ◽  
Sensitive Detector ◽  
Silicon Thin Film ◽  
Position Sensitive

Large-area 1D thin-film position-sensitive detector with high detection resolution

1995 ◽  
Vol 51 (2-3) ◽  
pp. 135-142 ◽  
Author(s):  
Elvira Fortunato ◽  
Guilherme Lavareda ◽  
Rodrigo Martins ◽  
Fernando Soares ◽  
Luís Fernandes
Keyword(s):  
Thin Film ◽  
Position Sensitive Detector ◽  
Sensitive Detector ◽  
Large Area ◽  
High Detection ◽  
Position Sensitive
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