The effect of the substrate temperature and the acceleration potential drop on the structural and physical properties of SiC thin films deposed by TVA method
Keyword(s):
2016 ◽
Vol 175
◽
pp. 118-124
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Keyword(s):
2021 ◽
Vol 10
(8)
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pp. 084008
2016 ◽
Vol 4
(2)
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pp. 191-200
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2013 ◽
Vol 75
◽
pp. 184-193
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Keyword(s):
2019 ◽
Vol 140
◽
pp. 205-212
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Keyword(s):
2020 ◽
Vol 31
(3)
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pp. 2398-2405
2002 ◽
Vol 71
(1)
◽
pp. 61-71
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Keyword(s):
Substrate temperature-dependent physical properties of nanocrystalline zirconium titanate thin films
2017 ◽
Vol 14
(5)
◽
pp. 971-980
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Keyword(s):
2003 ◽
Vol 38
(14)
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pp. 1841-1849
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