Enabling more capability within smaller pixels: advanced wafer-level process technologies for integration of focal plane arrays with readout electronics

2014 ◽  
Author(s):  
Dorota S. Temple ◽  
Erik P. Vick ◽  
Matthew R. Lueck ◽  
Dean Malta ◽  
Mark R. Skokan ◽  
...  
Keyword(s):  
Focal Plane ◽  
Focal Plane Arrays ◽  
Wafer Level ◽  
Readout Electronics ◽  
Level Process

Very large scale heterogeneous integration (VLSHI) and wafer-level vacuum packaging for infrared bolometer focal plane arrays

2013 ◽  
Vol 60 ◽  
pp. 251-259 ◽  
Author(s):  
Fredrik Forsberg ◽  
Niclas Roxhed ◽  
Andreas C. Fischer ◽  
Björn Samel ◽  
Per Ericsson ◽  
...  
Keyword(s):  
Focal Plane ◽  
Large Scale ◽  
Vacuum Packaging ◽  
Focal Plane Arrays ◽  
Heterogeneous Integration ◽  
Wafer Level

Three-Dimensional Integration Technology for Advanced Focal Planes

2008 ◽  
Vol 1112 ◽  
Author(s):  
Craig Lewis Keast ◽  
Brian Aull ◽  
James Burns ◽  
Chenson Chen ◽  
Jeff Knecht ◽  
...  
Keyword(s):  
Focal Plane ◽  
Three Dimensional ◽  
Focal Plane Arrays ◽  
Silicon On Insulator ◽  
Wafer Level ◽  
Integration Technology ◽  
Electrical Interconnection ◽  
Circuit Integration ◽  
Micrometer Scale ◽  
Soi Technology

AbstractWe have developed a three-dimensional (3D) circuit integration technology that exploits the advantages of silicon-on-insulator (SOI) technology to enable wafer-level stacking and micrometer-scale electrical interconnection of fully fabricated circuit wafers. This paper describes the 3D technology and discusses some of the advanced focal plane arrays that have been built using it.

Cu-Sn Wafer Level Bonding for Vacuum Encapsulation of Microbolometer Focal Plane Arrays

2019 ◽  
Vol 33 (4) ◽  
pp. 73-82 ◽  
Author(s):  
Adriana Lapadatu ◽  
Tor Ivar Simonsen ◽  
Gjermund Kittilsland ◽  
Birger Stark ◽  
Nils Hoivik ◽  
...  
Keyword(s):  
Focal Plane ◽  
Focal Plane Arrays ◽  
Wafer Level

Semiconductor YBACUO Uncooled Focal Plane Arrays

2006 ◽  
Author(s):  
Donald Butler ◽  
Zeynep Celik-Bulter
Keyword(s):  
Focal Plane ◽  
Focal Plane Arrays

Further Developments in Improved Sensitivity, Low-cost Uncooled IR Detector Focal Plane Arrays

2010 ◽  
Author(s):  
Wendy L. Sarney ◽  
John W. Little ◽  
Kimberley A. Olver ◽  
Frank E. Livingston ◽  
Krisztian Niesz ◽  
...  
Keyword(s):  
Focal Plane ◽  
Low Cost ◽  
Focal Plane Arrays ◽  
Ir Detector
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