Determination of thermo-optic properties of atomic layer deposited thin TiO2films for athermal resonant waveguide gratings by spectroscopic ellipsometry

2014 ◽  
Author(s):  
Muhammad Rizwan Saleem ◽  
Rizwan Ali ◽  
Seppo Honkanen ◽  
Jari Turunen
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Atomic Layer ◽  
Waveguide Gratings

Band offset determination of atomic-layer-deposited Al2O3and HfO2on InP by internal photoemission and spectroscopic ellipsometry

2013 ◽  
Vol 113 (2) ◽  
pp. 024504 ◽  
Author(s):  
K. Xu ◽  
H. Sio ◽  
O. A. Kirillov ◽  
L. Dong ◽  
M. Xu ◽  
...  
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Atomic Layer ◽  
Band Offset ◽  
Internal Photoemission

scholarly journals Optical Characterization of Ultra-Thin Films of Azo-Dye-Doped Polymers Using Ellipsometry and Surface Plasmon Resonance Spectroscopy

Photonics ◽  
2021 ◽  
Vol 8 (2) ◽  
pp. 41
Author(s):  
Najat Andam ◽  
Siham Refki ◽  
Hidekazu Ishitobi ◽  
Yasushi Inouye ◽  
Zouheir Sekkat
Keyword(s):  
Refractive Index ◽  
Optical Properties ◽  
Surface Plasmon Resonance ◽  
Surface Plasmon ◽  
Spectroscopic Ellipsometry ◽  
Plasmon Resonance ◽  
Complex Refractive Index ◽  
Resonance Spectroscopy ◽  
Doped Polymers

The determination of optical constants (i.e., real and imaginary parts of the complex refractive index (nc) and thickness (d)) of ultrathin films is often required in photonics. It may be done by using, for example, surface plasmon resonance (SPR) spectroscopy combined with either profilometry or atomic force microscopy (AFM). SPR yields the optical thickness (i.e., the product of nc and d) of the film, while profilometry and AFM yield its thickness, thereby allowing for the separate determination of nc and d. In this paper, we use SPR and profilometry to determine the complex refractive index of very thin (i.e., 58 nm) films of dye-doped polymers at different dye/polymer concentrations (a feature which constitutes the originality of this work), and we compare the SPR results with those obtained by using spectroscopic ellipsometry measurements performed on the same samples. To determine the optical properties of our film samples by ellipsometry, we used, for the theoretical fits to experimental data, Bruggeman’s effective medium model for the dye/polymer, assumed as a composite material, and the Lorentz model for dye absorption. We found an excellent agreement between the results obtained by SPR and ellipsometry, confirming that SPR is appropriate for measuring the optical properties of very thin coatings at a single light frequency, given that it is simpler in operation and data analysis than spectroscopic ellipsometry.

scholarly journals Determination of the Thickness and Optical Constants of ZrO2 by Spectroscopic Ellipsometry and Spectrophotometric Method

2011 ◽  
Vol 8 ◽  
pp. 223-227 ◽  
Author(s):  
R. Yusoh ◽  
M. Horprathum ◽  
P. Eiamchai ◽  
S. Chanyawadee ◽  
K. Aiempanakit
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Spectrophotometric Method ◽  
Optical Constants

Initial growth and properties of atomic layer deposited TiN films studied byin situ spectroscopic ellipsometry

2005 ◽  
Vol 2 (12) ◽  
pp. 3958-3962 ◽  
Author(s):  
E. Langereis ◽  
S. B. S. Heil ◽  
M. C. M. van de Sanden ◽  
W. M. M. Kessels
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Atomic Layer ◽  
Initial Growth ◽  
Tin Films

Accurate Determination of Optical Constants of Amorphous Absorbing Thin Films by Spectroscopic Ellipsometry

2015 ◽  
Vol 35 (4) ◽  
pp. 0431001 ◽  
Author(s):  
李江 Li Jiang ◽  
李沛 Li Pei ◽  
黄峰 Huang Feng ◽  
魏贤华 Wei Xianhua ◽  
葛芳芳 Ge Fangfang ◽  
...  
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry ◽  
Optical Constants ◽  
Accurate Determination

Structure determination of the Si(111)−7×3−In atomic-layer superconductor

2019 ◽  
Vol 99 (10) ◽  
Author(s):  
Tetsuroh Shirasawa ◽  
Shunsuke Yoshizawa ◽  
Toshio Takahashi ◽  
Takashi Uchihashi
Keyword(s):  
Structure Determination ◽  
Atomic Layer
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