Process diagnostics and control for excimer laser processing

1995 ◽  
Author(s):  
Karsten Schutte ◽  
Emil Schubert ◽  
Hans W. Bergmann
Keyword(s):  
Excimer Laser ◽  
Laser Processing ◽  
Diagnostics And Control ◽  
Process Diagnostics ◽  
And Control

Advanced high-performance processing tools for diagnostics and control in fusion devices

2021 ◽  
Vol 170 ◽  
pp. 112529
Author(s):  
N. Cruz ◽  
A.J.N. Batista ◽  
J.M. Cardoso ◽  
B.B. Carvalho ◽  
P.F. Carvalho ◽  
...  
Keyword(s):  
High Performance ◽  
Diagnostics And Control ◽  
And Control

Formation and control of boron buried layers in silicon using an excimer laser

1995 ◽  
Vol 16 (1) ◽  
pp. 14-16 ◽  
Author(s):  
G. Verma ◽  
A. Slaoui ◽  
S. Talwar ◽  
T.W. Sigmon
Keyword(s):  
Excimer Laser ◽  
Buried Layers ◽  
And Control

Finite element simulation for ultraviolet excimer laser processing of patterned Si/SiGe/Si(100) heterostructures

2010 ◽  
Vol 97 (1) ◽  
pp. 014102 ◽  
Author(s):  
J. C. Conde ◽  
E. Martín ◽  
S. Chiussi ◽  
F. Gontad ◽  
C. Serra ◽  
...  
Keyword(s):  
Finite Element ◽  
Finite Element Simulation ◽  
Excimer Laser ◽  
Laser Processing ◽  
Element Simulation

Excimer Laser Processing of Nodular Iron

1994 ◽  
Vol 9 (3) ◽  
pp. 415-427 ◽  
Author(s):  
A. Fontes ◽  
M. Jeandin ◽  
Olivier Uteza ◽  
Marc Sentis ◽  
Michel Frainais
Keyword(s):  
Excimer Laser ◽  
Laser Processing ◽  
Nodular Iron

Formation and control of phosphorus buried layers in silicon using a pulsed XeCl excimer laser

1996 ◽  
Vol 69 (3) ◽  
pp. 319-321
Author(s):  
G. Verma ◽  
S. Talwar ◽  
T. W. Sigmon
Keyword(s):  
Excimer Laser ◽  
Buried Layers ◽  
And Control ◽  
Xecl Excimer Laser
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