High precision double-interferometry displacement measurement by waveform transforming based on FFT

High precision and non obtrusive displacement measurement sensor for intelligent robots and systems

ETFA 2001. 8th International Conference on Emerging Technologies and Factory Automation. Proceedings (Cat. No.01TH8597) ◽

10.1109/etfa.2001.997781 ◽

2002 ◽

Author(s):

Y. Jourlin ◽

O. Parriaux ◽

F. Pigeon

Keyword(s):

High Precision ◽

Displacement Measurement ◽

Measurement Sensor ◽

Intelligent Robots

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A high-precision laser displacement measurement system

10.1117/12.2606551 ◽

2021 ◽

Author(s):

Wenqing Pan ◽

Dengwei Zhang ◽

Cui Liang ◽

Chao Ma ◽

Xiaowu Shu ◽

...

Keyword(s):

High Precision ◽

Measurement System ◽

Displacement Measurement

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High precision displacement measurement algorithmbased on depth fusion of grating projection pattern

Applied Optics ◽

10.1364/ao.447967 ◽

2022 ◽

Author(s):

Hai Yu ◽

WAN Hua ◽

LU Xinran ◽

DU Cai ◽

Liang Lihui

Keyword(s):

High Precision ◽

Displacement Measurement ◽

Projection Pattern

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Optic Grating Sensor Based High Precision Straight-line Displacement Measurement and Its Error Analysis

Proceedings of the 2019 International Conference on Modeling, Simulation, Optimization and Numerical Techniques (SMONT 2019) ◽

10.2991/smont-19.2019.48 ◽

2019 ◽

Author(s):

Songlin Wu ◽

Lei Dang ◽

Qian Yang ◽

Bochen Bai ◽

Longfei Gao

Keyword(s):

Error Analysis ◽

High Precision ◽

Displacement Measurement ◽

Straight Line

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Non-contact and high-precision displacement measurement based on tunnel magnetoresistance

Measurement Science and Technology ◽

10.1088/1361-6501/ab662b ◽

2020 ◽

Vol 31 (6) ◽

pp. 065102

Author(s):

Lunan Liu ◽

Yikun Yang ◽

Bintang Yang

Keyword(s):

High Precision ◽

Displacement Measurement ◽

Tunnel Magnetoresistance

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Long stroke displacement measurement with reduced coupling error supporting high precision control of a beam flexure-based micro-stage

Review of Scientific Instruments ◽

10.1063/5.0009965 ◽

2020 ◽

Vol 91 (7) ◽

pp. 073701

Author(s):

Shuaishuai Lu ◽

Peng Yan ◽

Bei Zhang

Keyword(s):

High Precision ◽

Displacement Measurement ◽

Precision Control ◽

Long Stroke ◽

Coupling Error

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Guidance characteristics of some displacement devices used in a high-precision He–Ne laser displacement measurement system

Review of Scientific Instruments ◽

10.1063/1.1148219 ◽

1997 ◽

Vol 68 (7) ◽

pp. 2913-2914

Author(s):

U. Brand ◽

K. Miyashita ◽

J. Hannemann

Keyword(s):

High Precision ◽

Measurement System ◽

Displacement Measurement

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High precision displacement measurement by statistical interferometry

Optics & Laser Technology ◽

10.1016/0030-3992(94)90073-6 ◽

1994 ◽

Vol 26 (6) ◽

pp. 425

Author(s):

Yoshinori Bitou ◽

Hirohumi Kadono ◽

Satoru Toyooka

Keyword(s):

High Precision ◽

Displacement Measurement

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High precision capacitance displacement measurement circuit design

Proceedings of the 3rd International Conference on Material, Mechanical and Manufacturing Engineering ◽

10.2991/ic3me-15.2015.206 ◽

2015 ◽

Author(s):

Xuefeng Xing ◽

Jianqiang Li ◽

Shixue Lv ◽

Linlin Xu ◽

Xiaopu Zhang

Keyword(s):

Circuit Design ◽

High Precision ◽

Displacement Measurement ◽

Measurement Circuit

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A three-dimension high-precision and non-contact dynamic angular displacement measurement system based on heterodyne interference

Optical Metrology and Inspection for Industrial Applications VI ◽

10.1117/12.2536959 ◽

2019 ◽

Cited By ~ 1

Author(s):

Shuai Zhao ◽

Dengwei Zhang ◽

Yilan Zhou ◽

Xiaowu Shu

Keyword(s):

High Precision ◽

Measurement System ◽

Angular Displacement ◽

Displacement Measurement ◽

Three Dimension

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