Fabrication of double-sided micro structured mechanical sensors based on SU-8 resist using a new micro molding process
2014 ◽
Vol 611-612
◽
pp. 685-692
Keyword(s):
2018 ◽
Vol 33
(4)
◽
pp. 442-452
◽
2014 ◽
Vol 23
(5)
◽
pp. 055004
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Keyword(s):
2003 ◽
Vol 43
(9)
◽
pp. 1542-1554
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