Quality factor enhancement for resonant MEMS applying an analogue feedback circuit driven by a lock-in amplifier
2017 ◽
Vol 26
(09)
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pp. 1750140
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1995 ◽
Vol 7
(1)
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pp. 215-228
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Keyword(s):
1982 ◽
Vol 43
(5)
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pp. 755-759
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1988 ◽
Vol 49
(C8)
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pp. C8-1947-C8-1948
Keyword(s):
2012 ◽
Vol 132
(11)
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pp. 1033-1038