Lock-in driven quality factor enhancement with parasitic effect compensation of a self-actuated piezoelectric MEMS cantilever
2013 ◽
Vol 23
(8)
◽
pp. 085009
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2019 ◽
Vol 297
◽
pp. 111541
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Keyword(s):
2013 ◽
Vol 20
(4-5)
◽
pp. 615-625
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2011 ◽
Vol 21
(2)
◽
pp. 025007
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1995 ◽
Vol 7
(1)
◽
pp. 215-228
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Keyword(s):
1982 ◽
Vol 43
(5)
◽
pp. 755-759
◽
1988 ◽
Vol 49
(C8)
◽
pp. C8-1947-C8-1948