A Lorentz force actuated magnetic field sensor with capacitive read-out

Author(s):  
M. Stifter ◽  
H. Steiner ◽  
A. Kainz ◽  
F. Keplinger ◽  
W. Hortschitz ◽  
...  
Author(s):  
Sangtak Park ◽  
Majed S. Al-Ghamdi ◽  
Mahmoud Khater ◽  
Eihab Abdel-Rahman ◽  
Mustafa Yavuz

This paper introduces a novel MEMS magnetic field sensor based on the Lorentz force. It measures torsional vibrations excited via Lorentz force. The sensor sensitivity and dynamic range can be tuned by varying an electrostatic bias. Experimental demonstration shows that the sensor sensitivity can be changed from 0.7 (m/s)/T at 6 V DC bias to 1.4 (m/s)/T at 0 V DC bias.


2004 ◽  
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pp. 112-118 ◽  
Author(s):  
Franz Keplinger ◽  
Samuel Kvasnica ◽  
Artur Jachimowicz ◽  
Franz Kohl ◽  
Johannes Steurer ◽  
...  

2016 ◽  
Vol 241 ◽  
pp. 12-18 ◽  
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Byoungyoul Park ◽  
Meiting Li ◽  
Sampath Liyanage ◽  
Cyrus Shafai

2017 ◽  
Vol 14 (5) ◽  
pp. 20161257-20161257 ◽  
Author(s):  
Muhammad U. Mian ◽  
John O. Dennis ◽  
Mohd H. M. Khir ◽  
Mawahib G. A. Ahmed ◽  
Almur A. S. Rabih ◽  
...  

Author(s):  
Geoffrey A. Cranch ◽  
Gordon M. Flockhart ◽  
Clay K. Kirkendall

Sensors ◽  
2015 ◽  
Vol 15 (8) ◽  
pp. 18256-18269 ◽  
Author(s):  
John Dennis ◽  
Farooq Ahmad ◽  
M. Khir ◽  
Nor Hamid

2021 ◽  
Vol 31 (5) ◽  
pp. 1-5
Author(s):  
Ivan P. Nevirkovets ◽  
Mikhail A. Belogolovskii ◽  
Oleg A. Mukhanov ◽  
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2021 ◽  
Vol 168 ◽  
pp. 112467
Author(s):  
Andre Torres ◽  
Karel Kovarik ◽  
Tomas Markovic ◽  
Jiri Adamek ◽  
Ivan Duran ◽  
...  

Author(s):  
Xue-Peng Jin ◽  
Hong-Zhi Sun ◽  
Shuo-Wei Jin ◽  
Wan-Ming Zhao ◽  
Jing-Ren Tang ◽  
...  

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