scholarly journals Optical Characterization of Lorentz Force Based CMOS-MEMS Magnetic Field Sensor

Sensors ◽  
2015 ◽  
Vol 15 (8) ◽  
pp. 18256-18269 ◽  
Author(s):  
John Dennis ◽  
Farooq Ahmad ◽  
M. Khir ◽  
Nor Hamid
Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 902 ◽  
Author(s):  
Aurelien Mazzamurro ◽  
Abdelkrim Talbi ◽  
Yannick Dusch ◽  
Omar Elmazria ◽  
Philippe Pernod ◽  
...  

Over the last decades, the use of Surface Acoustic Waves (SAW) has emerged as a promising technology in many applications such as filters, signal processing but also sensors. We report the fabrication and the characterization of a SAW delay line magnetic field sensor using uniaxial multi-layered 14×[TbCo2(3.7nm)/FeCo(4nm)] nanostructured thin film deposited on Y36° Lithium Niobate (Figure 1a). The sensor shows an interesting dependency to a tunable bias magnetic field with different orientations relative to the easy axis. The obtained results are well explained using an equivalent piezo-magnetic model described in a previous work.


Author(s):  
Sangtak Park ◽  
Majed S. Al-Ghamdi ◽  
Mahmoud Khater ◽  
Eihab Abdel-Rahman ◽  
Mustafa Yavuz

This paper introduces a novel MEMS magnetic field sensor based on the Lorentz force. It measures torsional vibrations excited via Lorentz force. The sensor sensitivity and dynamic range can be tuned by varying an electrostatic bias. Experimental demonstration shows that the sensor sensitivity can be changed from 0.7 (m/s)/T at 6 V DC bias to 1.4 (m/s)/T at 0 V DC bias.


2004 ◽  
Vol 110 (1-3) ◽  
pp. 112-118 ◽  
Author(s):  
Franz Keplinger ◽  
Samuel Kvasnica ◽  
Artur Jachimowicz ◽  
Franz Kohl ◽  
Johannes Steurer ◽  
...  

2016 ◽  
Vol 241 ◽  
pp. 12-18 ◽  
Author(s):  
Byoungyoul Park ◽  
Meiting Li ◽  
Sampath Liyanage ◽  
Cyrus Shafai

2017 ◽  
Vol 14 (5) ◽  
pp. 20161257-20161257 ◽  
Author(s):  
Muhammad U. Mian ◽  
John O. Dennis ◽  
Mohd H. M. Khir ◽  
Mawahib G. A. Ahmed ◽  
Almur A. S. Rabih ◽  
...  

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