Image formation mechanism in PMMA-MAA antracene positive photoresist exposed by pulsed laser and kinetics of its development

1990 ◽  
Author(s):  
Alexei L. Bogdanov ◽  
V. A. Nikitaev ◽  
Andrey B. Poljakov ◽  
V. E. Tukish ◽  
Kamil A. Valiev ◽  
...  
Keyword(s):  
Formation Mechanism ◽  
Pulsed Laser ◽  
Image Formation ◽  
Positive Photoresist ◽  
Kinetics Of

Crosslinking kinetics of polycarbosilane precursor in ozone atmosphere and the formation mechanism of continuous hollow SiC fiber

2019 ◽  
Vol 39 (6) ◽  
pp. 2028-2035 ◽  
Author(s):  
Xiali Zhen ◽  
Xueliang Pei ◽  
Yanfei Wang ◽  
Xiqiang Zhong ◽  
Liu He ◽  
...  
Keyword(s):  
Formation Mechanism ◽  
Sic Fiber ◽  
Kinetics Of

scholarly journals Oxygen in Complex Oxide Thin Films Grown by Pulsed Laser Deposition: a Perspective

2019 ◽  
Vol 33 (1) ◽  
pp. 205-212 ◽  
Author(s):  
Gertjan Koster ◽  
Dave H. A. Blank ◽  
Guus A. J. H. M. Rijnders
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Complex Oxide ◽  
Laser Deposition ◽  
Oxygen Stoichiometry ◽  
Oxide Thin Films ◽  
Film Synthesis ◽  
Kinetics Of ◽  
Oxidation Mechanisms

Abstract For thin film synthesis of complex oxides, one of the most important issues has always been how to oxidise the material. For a technique like pulsed laser deposition, a key benefit is the relatively high oxygen background pressure one can operate at, and therefor oxidation should be relatively straightforward. However, understanding the microscopic oxidation mechanisms turns out to be rather difficult. In this perspective, we give a brief overview of the sources of oxidation for complex oxide thin films grown by pulsed laser deposition. While it is clear what these sources are, their role in the kinetics of the formation of the crystal structure and oxygen stoichiometry is not fully understood.

scholarly journals Semiconductor technology: Kinetics of pulsed laser annealing

Nature ◽  
1985 ◽  
Vol 313 (5998) ◽  
pp. 100-100 ◽  
Author(s):  
Ian W. Boyd ◽  
Steven C. Moss
Keyword(s):  
Laser Annealing ◽  
Pulsed Laser ◽  
Semiconductor Technology ◽  
Pulsed Laser Annealing ◽  
Kinetics Of
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