Vertically integrated double-layer on-chip crystalline silicon nanomembranes based on adhesive bonding

2013 ◽  
Author(s):  
Yang Zhang ◽  
David Kwong ◽  
Xiaochuan Xu ◽  
Amir Hosseini ◽  
Sang Y. Yang ◽  
...  
Nanophotonics ◽  
2019 ◽  
Vol 9 (8) ◽  
pp. 2377-2385 ◽  
Author(s):  
Zhao Cheng ◽  
Xiaolong Zhu ◽  
Michael Galili ◽  
Lars Hagedorn Frandsen ◽  
Hao Hu ◽  
...  

AbstractGraphene has been widely used in silicon-based optical modulators for its ultra-broadband light absorption and ultrafast optoelectronic response. By incorporating graphene and slow-light silicon photonic crystal waveguide (PhCW), here we propose and experimentally demonstrate a unique double-layer graphene electro-absorption modulator in telecommunication applications. The modulator exhibits a modulation depth of 0.5 dB/μm with a bandwidth of 13.6 GHz, while graphene coverage length is only 1.2 μm in simulations. We also fabricated the graphene modulator on silicon platform, and the device achieved a modulation bandwidth at 12 GHz. The proposed graphene-PhCW modulator may have potentials in the applications of on-chip interconnections.


Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 1018
Author(s):  
Giuseppe Fiorentino ◽  
Ben Jones ◽  
Sophie Roth ◽  
Edith Grac ◽  
Murali Jayapala ◽  
...  

A composite, capillary-driven microfluidic system suitable for transmitted light microscopy of cells (e.g., red and white human blood cells) is fabricated and demonstrated. The microfluidic system consists of a microchannels network fabricated in a photo-patternable adhesive polymer on a quartz substrate, which, by means of adhesive bonding, is then connected to a silicon microfluidic die (for processing of the biological sample) and quartz die (to form the imaging chamber). The entire bonding process makes use of a very low temperature budget (200 °C). In this demonstrator, the silicon die consists of microfluidic channels with transition structures to allow conveyance of fluid utilizing capillary forces from the polymer channels to the silicon channels and back to the polymer channels. Compared to existing devices, this fully integrated platform combines on the same substrate silicon microfluidic capabilities with optical system analysis, representing a portable and versatile lab-on-chip device.


2020 ◽  
Vol 3 (1) ◽  
Author(s):  
Hanzhe Liu ◽  
Giulio Vampa ◽  
Jingyuan Linda Zhang ◽  
Yu Shi ◽  
Siddharth Buddhiraju ◽  
...  

Abstract Since the new millennium coherent extreme ultra-violet and soft x-ray radiation has revolutionized the understanding of dynamical physical, chemical and biological systems at the electron’s natural timescale. Unfortunately, coherent laser-based upconversion of infrared photons to vacuum-ultraviolet and soft x-ray high-order harmonics in gaseous, liquid and solid targets is notoriously inefficient. In dense nonlinear media, the limiting factor is strong re-absorption of the generated high-energy photons. Here we overcome this limitation by generating high-order harmonics from a periodic array of thin one-dimensional crystalline silicon ridge waveguides. Adding vacuum gaps between the ridges avoids the high absorption loss of the bulk and results in a ~ 100-fold increase of the extraction depth. As the grating period is varied, each high harmonic shows a different and marked modulation, indicating their waveguiding in the vacuum slots with reduced absorption. Looking ahead, our results enable bright on-chip coherent short-wavelength sources and may extend the usable spectral range of traditional nonlinear crystals to their absorption windows. Potential applications include on-chip chemically-sensitive spectro-nanoscopy.


2019 ◽  
Vol 5 (12) ◽  
pp. 1900917 ◽  
Author(s):  
Enming Song ◽  
Zhongxun Guo ◽  
Guodong Li ◽  
Fuyou Liao ◽  
Gongjin Li ◽  
...  

2015 ◽  
Vol 1758 ◽  
Author(s):  
Nicholas W. Piekiel ◽  
Christopher J. Morris ◽  
Wayne A. Churaman ◽  
David M. Lunking

ABSTRACTThe present study explores the burning of microscale porous silicon channels with sodium perchlorate. These on-chip porous silicon energetics were embedded in crystalline silicon, and therefore surrounded on three sides by an efficient thermal conductor. For slow burning systems, this presents complications as heat loss to the crystalline silicon substrate can result in inconsistent burning or flame extinction. We investigated <100 μm wide porous silicon strips, sparsely filled with sodium perchlorate (NaClO4), to probe the limits of on-chip combustion. Four different etch times were attempted to decrease the dimensions of the porous silicon strips. The smallest size achieved was 12 x 64 µm, and despite the small dimensions, demonstrated the same flame speed as the larger porous silicon strips of 6-7 m/s. We predict that unreacted porous silicon acts as a thermal insulator to aid combustion for slow burning porous silicon channels, and SEM images provide evidence to support this. We also investigated the small scale combustion of a rapidly burning sample (∼1200 m/s). Despite the rapid flame speed, the propagation followed a designed, winding flame path. The use of these small scale porous silicon samples could significantly reduce the energetic material footprint for future microscale applications.


2015 ◽  
Vol 4 (1) ◽  
pp. 120-125 ◽  
Author(s):  
Jung‐Hun Seo ◽  
Kan Zhang ◽  
Munho Kim ◽  
Deyin Zhao ◽  
Hongjun Yang ◽  
...  

2018 ◽  
Author(s):  
K. Hisatsune ◽  
Y. Takaku ◽  
K. Sasa ◽  
T. Hoshii ◽  
I. Muneta ◽  
...  

Author(s):  
Marie Pinti ◽  
Tanuja Kambham ◽  
Bowen Wang ◽  
Shaurya Prakash

Nanofluidic devices have a broad range of applications resulting from the dominance of surface-fluid interactions. Examples include molecular gating, sample preconcentration, and sample injection. Manipulation of small fluid samples is ideal for micro total analysis systems or lab on chip devices which perform multiple unit operations on a single chip. In this paper, fabrication procedures for two different ultra-low aspect ratio (ULAR) channel network designs are presented. The ULAR provides increased throughput compared to higher aspect ratio features with the same critical dimensions. Channel network designs allow for integration between microscale and nanoscale fluidic networks. A modified calcium assisted glass–glass bonding procedure was developed to fabricate chemically uniform, all glass nanochannels. A polydimethylsiloxane (PDMS)-glass adhesive bonding procedure was also developed as adhesive bonding allows for more robust fabrication with lower sensitivity to surface defects. The fabrication schemes presented allow for a broad array of available parameters for facile selection of device fabrication techniques depending on desired applications for lab on chip devices.


Sign in / Sign up

Export Citation Format

Share Document