A novel optical beam deflection detection system based on aspheric lens for high-speed atomic force microscope

Author(s):  
Jianyong Zhao ◽  
Guangyi Shang ◽  
Weitao Gong ◽  
Junen Yao
2021 ◽  
Vol 91 (6) ◽  
pp. 1043
Author(s):  
А.В. Анкудинов ◽  
А.М. Минарский

The issue of optimization of measurements of three spatial components of the probe-sample interaction force and the corresponding displacement vector of the "ideal cantilever" is considered. To determine these components in an atomic force microscope with an optical beam deflection scheme, it is necessary to register the bending angles at least at two points on the rectangular cantilever and the torsion angle at any of them. It has been proven analytically that one optimal point is the intersection of the probe axis with the console plane. A method to calculate the position of another optimal point has been developed. An experiment was carried out to map the force and displacement vector, and satisfactory agreement with the theory was obtained.


2014 ◽  
Vol 85 (10) ◽  
pp. 103710 ◽  
Author(s):  
H.-S. Liao ◽  
Y.-H. Chen ◽  
R.-F. Ding ◽  
H.-F. Huang ◽  
W.-M. Wang ◽  
...  

2000 ◽  
Vol 71 (1) ◽  
pp. 128-132 ◽  
Author(s):  
Kousuke Yokoyama ◽  
Taketoshi Ochi ◽  
Takayuki Uchihashi ◽  
Makoto Ashino ◽  
Yasuhiro Sugawara ◽  
...  

Author(s):  
Janik Schaude ◽  
Maxim Fimushkin ◽  
Tino Hausotte

AbstractThe article presents a redesigned sensor holder for an atomic force microscope (AFM) with an adjustable probe direction, which is integrated into a nano measuring machine (NMM-1). The AFM, consisting of a commercial piezoresistive cantilever operated in closed-loop intermitted contact-mode, is based on two rotational axes, which enable the adjustment of the probe direction to cover a complete hemisphere. The axes greatly enlarge the metrology frame of the measuring system by materials with a comparatively high coefficient of thermal expansion. The AFM is therefore operated within a thermostating housing with a long-term temperature stability of 17 mK. The sensor holder, connecting the rotational axes and the cantilever, inserted one adhesive bond, a soldered connection and a geometrically undefined clamping into the metrology circle, which might also be a source of measurement error. It has therefore been redesigned to a clamped senor holder, which is presented, evaluated and compared to the previous glued sensor holder within this paper. As will be shown, there are no significant differences between the two sensor holders. This leads to the conclusion, that the three aforementioned connections do not deteriorate the measurement precision, significantly. As only a minor portion of the positioning range of the piezoelectric actuator is needed to stimulate the cantilever near its resonance frequency, a high-speed closed-loop control that keeps the cantilever within its operating range using this piezoelectric actuator further on as actuator was implemented and is presented within this article.


Sensors ◽  
2021 ◽  
Vol 21 (2) ◽  
pp. 362
Author(s):  
Luke Oduor Otieno ◽  
Bernard Ouma Alunda ◽  
Jaehyun Kim ◽  
Yong Joong Lee

A high-speed atomic force microscope (HS-AFM) requires a specialized set of hardware and software and therefore improving video-rate HS-AFMs for general applications is an ongoing process. To improve the imaging rate of an AFM, all components have to be carefully redesigned since the slowest component determines the overall bandwidth of the instrument. In this work, we present a design of a compact HS-AFM scan-head featuring minimal loading on the Z-scanner. Using a custom-programmed controller and a high-speed lateral scanner, we demonstrate its working by obtaining topographic images of Blu-ray disk data tracks in contact- and tapping-modes. Images acquired using a contact-mode cantilever with a natural frequency of 60 kHz in constant deflection mode show good tracking of topography at 400 Hz. In constant height mode, tracking of topography is demonstrated at rates up to 1.9 kHz for the scan size of 1μm×1μm with 100×100 pixels.


2013 ◽  
Vol 84 (8) ◽  
pp. 083701 ◽  
Author(s):  
Eika Tsunemi ◽  
Kei Kobayashi ◽  
Noriaki Oyabu ◽  
Masaharu Hirose ◽  
Yoshiko Takenaka ◽  
...  

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