Subresolution artifacts optimized for use with Canon's CQUEST illumination system and their cost-effective realization using the Lepton EBES4 e-beam reticle generator

1994 ◽  
Author(s):  
Charles S. Biechler ◽  
C. M. Rose ◽  
David M. Walker ◽  
Akiyoshi Suzuki ◽  
Kazuhiro Takahashi
2018 ◽  
Vol 2018 ◽  
pp. 1-14 ◽  
Author(s):  
Mehmet Ali Özçelik

There is a lack of published peer-reviewed research comparing the efficiencies of distributed versus central sensor-controlled LED lighting systems. This research proposes improving the smart illumination of a room with external fenestration using central and distributed light sensors. The optical and electrical measurements of the daylight have been made in the case where the light was not distributed evenly and not sufficient. Test results show that the proposed distributed light sensor illumination system has increased the efficiency by 28% when compared to the proposed central system. It has also been shown that the two tested systems are more cost-effective than common smart illumination systems.


Author(s):  
E. A. Kenik ◽  
J. Bentley

Cliff and Lorimer (1) have proposed a simple approach to thin foil x-ray analy sis based on the ratio of x-ray peak intensities. However, there are several experimental pitfalls which must be recognized in obtaining the desired x-ray intensities. Undesirable x-ray induced fluorescence of the specimen can result from various mechanisms and leads to x-ray intensities not characteristic of electron excitation and further results in incorrect intensity ratios.In measuring the x-ray intensity ratio for NiAl as a function of foil thickness, Zaluzec and Fraser (2) found the ratio was not constant for thicknesses where absorption could be neglected. They demonstrated that this effect originated from x-ray induced fluorescence by blocking the beam with lead foil. The primary x-rays arise in the illumination system and result in varying intensity ratios and a finite x-ray spectrum even when the specimen is not intercepting the electron beam, an ‘in-hole’ spectrum. We have developed a second technique for detecting x-ray induced fluorescence based on the magnitude of the ‘in-hole’ spectrum with different filament emission currents and condenser apertures.


Author(s):  
John W. Coleman

The injector to be described is a component in the Electron Injector-Linear Accelerator—Condenser Module for illumination used on the variable 100-500kV electron microscope being built at the Radio Corporation of America for the University of Virginia.The injector is an independently powered, autonomous unit, operating at a constant 6kV positive with respect to accelerator potential, thereby making beam current independent of accelerator potential. The injector provides for on-axis ion trapping to prolong filament lifetime, and incorporates a derived Einzel lens for optical integration into the overall illumination system for microscopy. Electrostatic beam deflectors for alignment are an integral part of the apparatus. The entire injector unit is cantilevered off a door for side loading, and is topped with a 4-filament turret released electrically but driven by a self-contained Negator spring motor.


Author(s):  
Lawrence M. Roth

The female reproductive tract may be the site of a wide variety of benign and malignant tumors, as well as non-neoplastic tumor-like conditions, most of which can be diagnosed by light microscopic examination including special stains and more recently immunoperoxidase techniques. Nevertheless there are situations where ultrastructural examination can contribute substantially to an accurate and specific diagnosis. It is my opinion that electron microscopy can be of greatest benefit and is most cost effective when applied in conjunction with other methodologies. Thus, I have developed an approach which has proved useful for me and may have benefit for others. In cases where it is deemed of potential value, glutaraldehyde-fixed material is obtained at the time of frozen section or otherwise at operation. Coordination with the gynecologic oncologist is required in the latter situation. This material is processed and blocked and is available if a future need arises.


Author(s):  
M. Rühle ◽  
J. Mayer ◽  
J.C.H. Spence ◽  
J. Bihr ◽  
W. Probst ◽  
...  

A new Zeiss TEM with an imaging Omega filter is a fully digitized, side-entry, 120 kV TEM/STEM instrument for materials science. The machine possesses an Omega magnetic imaging energy filter (see Fig. 1) placed between the third and fourth projector lens. Lanio designed the filter and a prototype was built at the Fritz-Haber-Institut in Berlin, Germany. The imaging magnetic filter allows energy-filtered images or diffraction patterns to be recorded without scanning using efficient area detection. The energy dispersion at the exit slit (Fig. 1) results in ∼ 1.5 μm/eV which allows imaging with energy windows of ≤ 10 eV. The smallest probe size of the microscope is 1.6 nm and the Koehler illumination system is used for the first time in a TEM. Serial recording of EELS spectra with a resolution < 1 eV is possible. The digital control allows X,Y,Z coordinates and tilt settings to be stored and later recalled.


Author(s):  
M. Iwatsuki ◽  
Y. Kokubo ◽  
Y. Harada

On accout of its high brightness, small optical source size, and minimal energy spread, the field emission gun (FEG) has the advantage that it provides the conventional transmission electron microscope (TEM) with a highly coherent illumination system and directly improves the resolving power and signal-to-noise ratio of the scanning electron microscope (SEM). The FEG is generally classified into two types; the cold field emission (C-FEG) and thermal field emission gun (T-FEG). The former, in which a field emitter is used at the room temperature, was successfully developed as an electron source for the SEM. The latter, in which the emitter is heated to the temperature range of 1000-1800°K, was also proved to be very suited as an electron source for the TEM, as well as for the SEM. Some characteristics of the two types of the FEG have been studied and reported by many authors. However, the results of the respective types have been obtained separately under different experimental conditions.


Author(s):  
M.A. Gribelyuk ◽  
J.M. Cowley

Recently the use of a biprism in a STEM instrument has been suggested for recording of a hologram. A biprism is inserted in the illumination system and creates two coherent focussed beams at the specimen level with a probe size d= 5-10Å. If one beam passes through an object and another one passes in vacuum, an interference pattern, i.e. a hologram can be observed in diffraction plane (Fig.1).


Author(s):  
James F. Mancuso

IBM PC compatible computers are widely used in microscopy for applications ranging from control to image acquisition and analysis. The choice of IBM-PC based systems over competing computer platforms can be based on technical merit alone or on a number of factors relating to economics, availability of peripherals, management dictum, or simple personal preference.IBM-PC got a strong “head start” by first dominating clerical, document processing and financial applications. The use of these computers spilled into the laboratory where the DOS based IBM-PC replaced mini-computers. Compared to minicomputer, the PC provided a more for cost-effective platform for applications in numerical analysis, engineering and design, instrument control, image acquisition and image processing. In addition, the sitewide use of a common PC platform could reduce the cost of training and support services relative to cases where many different computer platforms were used. This could be especially true for the microscopists who must use computers in both the laboratory and the office.


Author(s):  
L. F. Allard ◽  
E. Völkl ◽  
T. A. Nolan

The illumination system of the cold field emission (CFE) Hitachi HF-2000 TEM operates with a single condenser lens in normal imaging mode, and with a second condenser lens excited to give the ultra-fine 1 nm probe for microanalysis. The electron gun provides a guaranteed high brightness of better than 7×l08 A/cm2/sr, more than twice the guaranteed brightness of Schottky emission guns. There have been several articles in the recent literature (e.g. refs.) which claim that the geometry of this illumination system yields a total current which is so low that when the beam is spread at low magnifications (say 10 kX), the operator must “keep his eyes glued to the binoculars” in order to see the image. It is also claimed that this illuminating system produces an isoplanatic patch (the area over which image character does not vary significantly) at high magnification which is so small that the instrument is ineffective for recording high resolution images.


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