X-ray mask for optical heterodyne alignment

1994 ◽  
Author(s):  
Masanori Suzuki ◽  
Mitsuo Fukuda ◽  
F. Omata ◽  
H. Tsuyuzaki ◽  
Takashi Ohkubo ◽  
...  
Keyword(s):  
Optical Heterodyne ◽  
X Ray

A Vertical X-ray Stepper for SOR Lithography

1991 ◽  
Vol 3 (4) ◽  
pp. 346-353
Author(s):  
Sunao Ishihara ◽  
◽  
Atsunobu Une ◽  
Munenori Kanai ◽  
Masanori Suzuki ◽  
...  
Keyword(s):  
Optical Heterodyne ◽  
Air Bearing ◽  
X Ray ◽  
Thrust Bearings ◽  
Alignment System ◽  
Radial Thrust ◽  
Better Than

A vertical x-ray stepper for SOR lithography has been developed. The stepper exposes wafers in a normal atmosphere to vertically-scanned SOR with continuous alignment control during exposure. The key devices of the stepper are a vertical X-Y stage and an opticalheterodyne alignment system. The X-Y stage uses airlubricated components, including air bearing lead screws, linear sliders and radial/thrust bearings. The optical-heterodyne alignment system detects the displacement between the mask and wafer gratings with precision of 8.3nm. Several exposure experiments proved that the alignment capability is better than ±0.1μm for a 3σ-value.

A new optical heterodyne alignment and gap detection technique for x-ray steppers

1994 ◽  
Vol 23 (1-4) ◽  
pp. 185-188 ◽  
Author(s):  
Katsuhiro Kato ◽  
Tohru Itoh ◽  
Nobufumi Atoda
Keyword(s):  
Detection Technique ◽  
Gap Detection ◽  
Optical Heterodyne ◽  
X Ray

Space and Time Distribution of Hard X-Ray Emission in a Loop at the Beginning of a Flare

1994 ◽  
Vol 144 ◽  
pp. 275-277
Author(s):  
M. Karlický ◽  
J. C. Hénoux
Keyword(s):  
Time Distribution ◽  
Electron Bombardment ◽  
Spatial Evolution ◽  
Superthermal Electrons ◽  
Flare Loop ◽  
X Ray ◽  
Superthermal Electron ◽  
Flare Loops ◽  
Chromospheric Evaporation ◽  
Temporal And Spatial

AbstractUsing a new ID hybrid model of the electron bombardment in flare loops, we study not only the evolution of densities, plasma velocities and temperatures in the loop, but also the temporal and spatial evolution of hard X-ray emission. In the present paper a continuous bombardment by electrons isotropically accelerated at the top of flare loop with a power-law injection distribution function is considered. The computations include the effects of the return-current that reduces significantly the depth of the chromospheric layer which is evaporated. The present modelling is made with superthermal electron parameters corresponding to the classical resistivity regime for an input energy flux of superthermal electrons of 109erg cm−2s−1. It was found that due to the electron bombardment the two chromospheric evaporation waves are generated at both feet of the loop and they propagate up to the top, where they collide and cause temporary density and hard X-ray enhancements.

Some Problems in Understanding the Solar Corona

1994 ◽  
Vol 144 ◽  
pp. 1-9
Author(s):  
A. H. Gabriel
Keyword(s):  
Solar Corona ◽  
Solar Atmosphere ◽  
Theoretical Modelling ◽  
Total System ◽  
Major Advance ◽  
X Ray ◽  
Proper Perspective ◽  
Space Observations

The development of the physics of the solar atmosphere during the last 50 years has been greatly influenced by the increasing capability of observations made from space. Access to images and spectra of the hotter plasma in the UV, XUV and X-ray regions provided a major advance over the few coronal forbidden lines seen in the visible and enabled the cooler chromospheric and photospheric plasma to be seen in its proper perspective, as part of a total system. In this way space observations have stimulated new and important advances, not only in space but also in ground-based observations and theoretical modelling, so that today we find a well-balanced harmony between the three techniques.

White-Light Coronal Structures: Streamers and CMEs

1994 ◽  
Vol 144 ◽  
pp. 82
Author(s):  
E. Hildner
Keyword(s):  
Emission Line ◽  
Electron Density ◽  
White Light ◽  
Coronal Mass Ejections ◽  
X Rays ◽  
Solar Cycles ◽  
Temperature Function ◽  
X Ray ◽  
Eclipse Observations ◽  
Coronal Structures

AbstractOver the last twenty years, orbiting coronagraphs have vastly increased the amount of observational material for the whitelight corona. Spanning almost two solar cycles, and augmented by ground-based K-coronameter, emission-line, and eclipse observations, these data allow us to assess,inter alia: the typical and atypical behavior of the corona; how the corona evolves on time scales from minutes to a decade; and (in some respects) the relation between photospheric, coronal, and interplanetary features. This talk will review recent results on these three topics. A remark or two will attempt to relate the whitelight corona between 1.5 and 6 R⊙to the corona seen at lower altitudes in soft X-rays (e.g., with Yohkoh). The whitelight emission depends only on integrated electron density independent of temperature, whereas the soft X-ray emission depends upon the integral of electron density squared times a temperature function. The properties of coronal mass ejections (CMEs) will be reviewed briefly and their relationships to other solar and interplanetary phenomena will be noted.

Iron K-Line Emission from X-Ray Binaries

1988 ◽  
Vol 102 ◽  
pp. 47-50
Author(s):  
K. Masai ◽  
S. Hayakawa ◽  
F. Nagase
Keyword(s):  
Accretion Disk ◽  
Radiative Recombination ◽  
Characteristic Temperature ◽  
Line Emission ◽  
Ionization Front ◽  
Continuum Radiation ◽  
X Ray ◽  
Low Mass ◽  
X Ray Binaries

AbstractEmission mechanisms of the iron Kα-lines in X-ray binaries are discussed in relation with the characteristic temperature Txof continuum radiation thereof. The 6.7 keV line is ascribed to radiative recombination followed by cascades in a corona of ∼ 100 eV formed above the accretion disk. This mechanism is attained for Tx≲ 10 keV as observed for low mass X-ray binaries. The 6.4 keV line observed for binary X-ray pulsars with Tx> 10 keV is likely due to fluorescence outside the He II ionization front.

Diagnostics of Gold Laser Plasmas

1988 ◽  
Vol 102 ◽  
pp. 357-360
Author(s):  
J.C. Gauthier ◽  
J.P. Geindre ◽  
P. Monier ◽  
C. Chenais-Popovics ◽  
N. Tragin ◽  
...  
Keyword(s):  
Experimental Results ◽  
Pure Gold ◽  
Electronic Temperature ◽  
X Ray ◽  
Laser Plasmas ◽  
Collisional Radiative Model ◽  
Radiative Model

AbstractIn order to achieve a nickel-like X ray laser scheme we need a tool to determine the parameters which characterise the high-Z plasma. The aim of this work is to study gold laser plasmas and to compare experimental results to a collisional-radiative model which describes nickel-like ions. The electronic temperature and density are measured by the emission of an aluminium tracer. They are compared to the predictions of the nickel-like model for pure gold. The results show that the density and temperature can be estimated in a pure gold plasma.

Axial Observation of X-Ray Spectra from a Beam-Foil Source

1988 ◽  
Vol 102 ◽  
pp. 339-342
Author(s):  
J.M. Laming ◽  
J.D. Silver ◽  
R. Barnsley ◽  
J. Dunn ◽  
K.D. Evans ◽  
...  
Keyword(s):  
Spectral Resolution ◽  
Heavy Ion ◽  
Ion Beams ◽  
Beam Axis ◽  
Doppler Broadening ◽  
X Ray ◽  
Beam Foil

AbstractNew observations of x-ray spectra from foil-excited heavy ion beams are reported. By observing the target in a direction along the beam axis, an improvement in spectral resolution, δλ/λ, by about a factor of two is achieved, due to the reduced Doppler broadening in this geometry.

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