Possibility of real-time proximity effect correction for reticle writing

1994 ◽  
Author(s):  
Takayuki Abe
Keyword(s):  
Real Time ◽  
Proximity Effect ◽  
Proximity Effect Correction

High-Speed Convolution System for Real-Time Proximity Effect Correction

1998 ◽  
Vol 37 (Part 1, No. 12B) ◽  
pp. 6779-6784 ◽  
Author(s):  
Susumu Oogi ◽  
Takiji Ishimura ◽  
Takashi Kamikubo ◽  
Mitsuko Shimizu ◽  
Yoshiaki Hattori ◽  
...  
Keyword(s):  
Real Time ◽  
Proximity Effect ◽  
High Speed ◽  
Proximity Effect Correction

Implementation of real-time proximity effect correction in a raster shaped beam tool

2000 ◽  
Vol 18 (6) ◽  
pp. 3138 ◽  
Author(s):  
V. Boegli ◽  
L. Johnson ◽  
H. Kao ◽  
L. Veneklasen ◽  
U. Hofmann ◽  
...  
Keyword(s):  
Real Time ◽  
Proximity Effect ◽  
Shaped Beam ◽  
Proximity Effect Correction

Fabrication of Si photonic waveguides by electron beam lithography using improved proximity effect correction

2020 ◽  
Vol 59 (12) ◽  
pp. 126502
Author(s):  
Moataz Eissa ◽  
Takuya Mitarai ◽  
Tomohiro Amemiya ◽  
Yasuyuki Miyamoto ◽  
Nobuhiko Nishiyama
Keyword(s):  
Electron Beam ◽  
Proximity Effect ◽  
Electron Beam Lithography ◽  
Photonic Waveguides ◽  
Proximity Effect Correction

Proximity effect correction for reticle fabrication

2000 ◽  
Author(s):  
Masao Sugiyama ◽  
Shinji Kubo ◽  
Koji Hiruta ◽  
Takayuki Iwamatsu ◽  
Tatsuya Fujisawa ◽  
...  
Keyword(s):  
Proximity Effect ◽  
Proximity Effect Correction

Proximity effect correction by the GHOST method using a scattering stencil mask

1999 ◽  
Vol 17 (6) ◽  
pp. 2860 ◽  
Author(s):  
Hiroshi Yamashita ◽  
Eiichi Nomura ◽  
Shoko Manako ◽  
Hideo Kobinata ◽  
Ken Nakajima ◽  
...  
Keyword(s):  
Proximity Effect ◽  
Stencil Mask ◽  
Proximity Effect Correction
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