New low-voltage SEM technology for imaging and metrology of submicrometer contact holes and other high-aspect-ratio structures

Author(s):  
Kevin M. Monahan ◽  
Guillermo L. Toro-Lira ◽  
Mark P. Davidson
Author(s):  
Minchul Shin ◽  
Jongsoo Choi ◽  
Ryan Q. Rudy ◽  
Christopher Kao ◽  
Jeffrey S. Pulskamp ◽  
...  

A fabrication procedure is presented for creating microactuation elements that link piezoelectric thin-films with high-aspect ratio parylene microstructures. Resulting actuators permit relatively large rotational motions for low voltage operation, while maintaining large weight-bearing capacity. Actuator fabrication is performed on a silicon wafer though a combination of metal and thin-film lead-zirconate-titanate (PZT) deposition and patterning, parylene refill of high-aspect ratio trenches, and dry release of moving parts from the silicon substrate. Static and dynamic responses of various test structures are measured, to estimate material properties of the integrated PZT-polymer structures, for use in future actuator modeling and optimization.


2018 ◽  
Author(s):  
Gen Hayase

By exploiting the dispersibility and rigidity of boehmite nanofibers (BNFs) with a high aspect ratio of 4 nm in diameter and several micrometers in length, multiwall-carbon nanotubes (MWCNTs) were successfully dispersed in aqueous solutions. In these sols, the MWCNTs were dispersed at a ratio of about 5–8% relative to BNFs. Self-standing BNF–nanotube films were also obtained by filtering these dispersions and showing their functionality. These films can be expected to be applied to sensing materials.


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