Correcting for diffraction in the far-infrared reflectance measurement of rough surfaces

1993 ◽  
Author(s):  
Sheldon M. Smith
Keyword(s):  
Rough Surfaces ◽  
Far Infrared ◽  
Infrared Reflectance ◽  
Reflectance Measurement

Modeling, Simulation and Control of Single Wafer Process in Cluster Tool Base on Ft-Ir In-Line Sensor

1995 ◽  
Vol 389 ◽  
Author(s):  
Shaohua Liu ◽  
Peter Solomon ◽  
R. Carpio ◽  
B. Fowler ◽  
D. Simmons ◽  
...  
Keyword(s):  
Thin Film ◽  
Semiconductor Industry ◽  
Current Approach ◽  
Infrared Reflectance ◽  
Film Properties ◽  
Reflectance Measurement ◽  
Infrared Spectrometer ◽  
Ft Ir ◽  
And Control ◽  
Cluster Tool

ABSTRACTThis paper outlines our current approach to utilize infrared reflectance spectroscopy for thin film measurement in the semiconductor industry. The multi-layer thickness and doping concentration of IC wafers can be determined by a single angle, unpolarized infrared reflectance measurement performed using Fourier transform infrared spectrometer. A computer algorithm, which matches theoretical to measured infrared reflectance spectra, was successfully employed to determine multiple thin film properties.

Infrared reflectance measurement for InN thin film characterization

2006 ◽  
Vol 3 (6) ◽  
pp. 1874-1878 ◽  
Author(s):  
K. Fukui ◽  
Y. Kugumiya ◽  
N. Nakagawa ◽  
A. Yamamoto
Keyword(s):  
Thin Film ◽  
Infrared Reflectance ◽  
Reflectance Measurement ◽  
Thin Film Characterization

scholarly journals Pressure dependence of far-infrared reflectance spectra in layered iron oxide LuFe2O4

2016 ◽  
Vol 41 (1) ◽  
pp. 109-112
Author(s):  
T. Go ◽  
H. Okamura ◽  
G. Oohata ◽  
T. Nagata ◽  
T. Moriwaki ◽  
...  
Keyword(s):  
Iron Oxide ◽  
Pressure Dependence ◽  
Far Infrared ◽  
Reflectance Spectra ◽  
Infrared Reflectance

scholarly journals Temperature-dependent far-infrared reflectance of an epitaxial (BaTiO3)8/(SrTiO3)4 superlattice

2017 ◽  
Vol 95 (21) ◽  
Author(s):  
V. Železný ◽  
O. Caha ◽  
A. Soukiassian ◽  
D. G. Schlom ◽  
X. X. Xi
Keyword(s):  
Far Infrared ◽  
Infrared Reflectance ◽  
Temperature Dependent

Far infrared reflectance of sintered nickel manganite samples for negative temperature coefficient thermistors

2007 ◽  
Vol 42 (8) ◽  
pp. 1492-1498 ◽  
Author(s):  
M.V. Nikolić ◽  
K.M. Paraskevopoulos ◽  
O.S. Aleksić ◽  
T.T. Zorba ◽  
S.M. Savić ◽  
...  
Keyword(s):  
Temperature Coefficient ◽  
Negative Temperature Coefficient ◽  
Far Infrared ◽  
Negative Temperature ◽  
Infrared Reflectance

Analysis of Doping in ZnSe and ZnSSe by Far-Infrared Reflectance under Oblique Incidence

1995 ◽  
Vol 182-184 ◽  
pp. 73-76 ◽  
Author(s):  
J. Hermans ◽  
V. Offermann ◽  
J. Woitok ◽  
J. Geurts ◽  
H. Stanzl ◽  
...  
Keyword(s):  
Oblique Incidence ◽  
Far Infrared ◽  
Infrared Reflectance
Sign in / Sign up

Export Citation Format

Share Document