Finite element analysis of dynamic thermal distortions of an x-ray mask for synchrotron radiation lithography
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1992 ◽
Vol 63
(1)
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pp. 591-594
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1996 ◽
Vol 62
(604)
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pp. 2675-2680
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2019 ◽
Vol 75
(a2)
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pp. e434-e434
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1988 ◽
Vol 266
(1-3)
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pp. 507-512
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2001 ◽
Vol 2001.76
(0)
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pp. _6-11_-_6-12_
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2013 ◽
Vol 2013.88
(0)
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pp. _10-5_