Finite element analysis of dynamic thermal distortions of an x-ray mask for synchrotron radiation lithography

Author(s):  
Eric A. Haytcher ◽  
Roxann L. Engelstad ◽  
N. M. Schnurr
1992 ◽  
Vol 63 (1) ◽  
pp. 591-594 ◽  
Author(s):  
H. T. H. Chen ◽  
W. Ng ◽  
R. L. Engelstad

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