Finite element analysis of a scanning x‐ray microscope micropositioning stage
1992 ◽
Vol 63
(1)
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pp. 591-594
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1996 ◽
Vol 62
(604)
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pp. 2675-2680
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2019 ◽
Vol 75
(a2)
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pp. e434-e434
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2001 ◽
Vol 2001.76
(0)
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pp. _6-11_-_6-12_
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2014 ◽
Vol 70
(4)
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pp. 338-347
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2017 ◽
Vol 24
(3)
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pp. 615-621
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