Measurement of physical thicknesses in micromachined structures consisting of glass and c-Si, by Fourier transform infrared reflection

M. Kildemo

doi:10.1117/1.602205

Measurement of physical thicknesses in micromachined structures consisting of glass and c-Si, by Fourier transform infrared reflection

Optical Engineering ◽

10.1117/1.602205 ◽

1999 ◽

Vol 38 (9) ◽

pp. 1542 ◽

Cited By ~ 5

Author(s):

M. Kildemo

Keyword(s):

Fourier Transform ◽

Fourier Transform Infrared ◽

Infrared Reflection

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Anisotropy Studied by Polarization-Modulated Fourier Transform Infrared Reflection Difference Microspectroscopy

Applied Spectroscopy ◽

10.1366/000370208783575500 ◽

2008 ◽

Vol 62 (2) ◽

pp. 171-175 ◽

Cited By ~ 5

Author(s):

M. Schmidt ◽

J. S. Lee ◽

M. Grunze ◽

K. H. Kim ◽

U. Schade

Keyword(s):

Fourier Transform ◽

Fourier Transform Infrared ◽

Infrared Reflection

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Film Growth of Ice by Vapor Deposition at 128−185 K Studied by Fourier Transform Infrared Reflection−Absorption Spectroscopy: Evolution of the OH Stretch and the Dangling Bond with Film Thickness

The Journal of Physical Chemistry B ◽

10.1021/jp0142841 ◽

2002 ◽

Vol 106 (24) ◽

pp. 6234-6247 ◽

Cited By ~ 34

Author(s):

S. Mitlin ◽

K. T. Leung

Keyword(s):

Fourier Transform ◽

Film Thickness ◽

Absorption Spectroscopy ◽

Vapor Deposition ◽

Film Growth ◽

Fourier Transform Infrared ◽

Dangling Bond ◽

Infrared Reflection Absorption Spectroscopy ◽

Infrared Reflection

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Fourier transform infrared reflection-absorption spectroscopy of surface species

Journal of Electron Spectroscopy and Related Phenomena ◽

10.1016/0368-2048(83)85032-4 ◽

1983 ◽

Vol 30 (1) ◽

pp. 43-50 ◽

Cited By ~ 55

Author(s):

William G. Golden ◽

David D. Saperstein

Keyword(s):

Fourier Transform ◽

Absorption Spectroscopy ◽

Fourier Transform Infrared ◽

Surface Species ◽

Infrared Reflection Absorption Spectroscopy ◽

Infrared Reflection

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Nature and structure of adsorption layer on apatite contacted with oleate solution. 1. Adsorption and Fourier transform infrared reflection studies

Langmuir ◽

10.1021/la00033a020 ◽

1993 ◽

Vol 9 (9) ◽

pp. 2370-2382 ◽

Cited By ~ 38

Author(s):

J. A. Mielczarski ◽

J. M. Cases ◽

E. Bouquet ◽

O. Barres ◽

J. F. Delon

Keyword(s):

Fourier Transform ◽

Adsorption Layer ◽

Fourier Transform Infrared ◽

Infrared Reflection

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Time-resolved Fourier-transform infrared reflection study on photoinduced phase transition of tetrathiafulvalene-p-chloranil crystal

The European Physical Journal B ◽

10.1140/epjb/e2013-30616-4 ◽

2013 ◽

Vol 86 (3) ◽

Cited By ~ 3

Author(s):

Aya Nagahori ◽

Nobuhiko Kubota ◽

Chihiro Itoh

Keyword(s):

Phase Transition ◽

Fourier Transform ◽

Fourier Transform Infrared ◽

Time Resolved ◽

Infrared Reflection

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Application of polarization-modulated Fourier transform infrared reflection-absorption spectroscopy to the study of carbon monoxide adsorption and oxidation of a smooth platinum electrode

The Journal of Physical Chemistry ◽

10.1021/j150651a004 ◽

1984 ◽

Vol 88 (7) ◽

pp. 1275-1277 ◽

Cited By ~ 73

Author(s):

William G. Golden ◽

Keiji Kunimatsu ◽

Hajime Seki

Keyword(s):

Carbon Monoxide ◽

Fourier Transform ◽

Absorption Spectroscopy ◽

Platinum Electrode ◽

Fourier Transform Infrared ◽

Carbon Monoxide Adsorption ◽

Infrared Reflection Absorption Spectroscopy ◽

Infrared Reflection

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Fourier transform infrared reflection (FTIR) spectroscopy of corrosion films on irradiated zirconium alloys

Journal of Nuclear Materials ◽

10.1016/0022-3115(90)90212-6 ◽

1990 ◽

Vol 175 (3) ◽

pp. 237-243 ◽

Cited By ~ 20

Author(s):

N. Ramasubramanian ◽

V.C. Ling

Keyword(s):

Fourier Transform ◽

Ftir Spectroscopy ◽

Zirconium Alloys ◽

Fourier Transform Infrared ◽

Infrared Reflection

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Fourier transform infrared reflection absorption spectroscopy studies of adsorbates and surface reactions: Bridging the pressure gap between surface science and catalysis

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.578530 ◽

1993 ◽

Vol 11 (4) ◽

pp. 1957-1963 ◽

Cited By ~ 7

Author(s):

F. M. Hoffmann ◽

M. D. Weisel

Keyword(s):

Fourier Transform ◽

Surface Science ◽

Absorption Spectroscopy ◽

Surface Reactions ◽

Fourier Transform Infrared ◽

Infrared Reflection Absorption Spectroscopy ◽

Pressure Gap ◽

Infrared Reflection ◽

Spectroscopy Studies

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A Fourier transform infrared reflection absorption spectroscopy study of chemisorbed PF3on Ni(111): Coverage and temperature dependence

The Journal of Chemical Physics ◽

10.1063/1.460415 ◽

1991 ◽

Vol 94 (9) ◽

pp. 6256-6263 ◽

Cited By ~ 8

Author(s):

Xingcai Guo ◽

John T. Yates ◽

Vijay K. Agrawal ◽

Michael Trenary

Keyword(s):

Fourier Transform ◽

Temperature Dependence ◽

Absorption Spectroscopy ◽

Fourier Transform Infrared ◽

Spectroscopy Study ◽

Infrared Reflection Absorption Spectroscopy ◽

Infrared Reflection

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Fourier-transform infrared reflection study of the morphology of porous semiconductor structures

Journal of Physics Condensed Matter ◽

10.1088/0953-8984/12/16/311 ◽

2000 ◽

Vol 12 (16) ◽

pp. 3897-3900 ◽

Cited By ~ 4

Author(s):

A Belogorokhov ◽

Yu A Pusep ◽

L Belogorokhova

Keyword(s):

Fourier Transform ◽

Fourier Transform Infrared ◽

Semiconductor Structures ◽

Infrared Reflection

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