Absolute distance measurement using wavelength‐multiplexed phase‐locked laser diode interferometry

Takamasa Suzuki

doi:10.1117/1.600921

Absolute distance measurement using wavelength‐multiplexed phase‐locked laser diode interferometry

Optical Engineering ◽

10.1117/1.600921 ◽

1996 ◽

Vol 35 (2) ◽

pp. 492 ◽

Cited By ~ 10

Author(s):

Takamasa Suzuki

Keyword(s):

Laser Diode ◽

Distance Measurement ◽

Absolute Distance

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Interferometric absolute distance measurement utilizing a mode-jump region of a laser diode

Optics Communications ◽

10.1016/0030-4018(90)90090-g ◽

1990 ◽

Vol 77 (4) ◽

pp. 275-278 ◽

Cited By ~ 7

Author(s):

Katuo Seta ◽

Barry K. Ward

Keyword(s):

Laser Diode ◽

Distance Measurement ◽

Absolute Distance

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Tunable laser diode for absolute distance measurement

10.1117/12.316466 ◽

1998 ◽

Cited By ~ 5

Author(s):

Abdeslam Hafidi ◽

Pierre Pfeiffer ◽

Patrick Meyrueis

Keyword(s):

Laser Diode ◽

Tunable Laser ◽

Distance Measurement ◽

Absolute Distance ◽

Tunable Laser Diode

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Absolute Distance Measurement With Improved Accuracy Using Laser Diode Self-Mixing Interferometry in a Closed Loop

IEEE Transactions on Instrumentation and Measurement ◽

10.1109/tim.2007.904551 ◽

2007 ◽

Vol 56 (5) ◽

pp. 1894-1900 ◽

Cited By ~ 86

Author(s):

Michele Norgia ◽

Guido Giuliani ◽

Silvano Donati

Keyword(s):

Laser Diode ◽

Closed Loop ◽

Distance Measurement ◽

Absolute Distance ◽

Improved Accuracy

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Absolute distance measurement with a sampling type of double sinusoidal phase-modulating laser diode interferometer

10.1117/12.465657 ◽

2002 ◽

Author(s):

Takamasa Suzuki ◽

Tatsuhiko Sekimoto ◽

Osami Sasaki

Keyword(s):

Laser Diode ◽

Distance Measurement ◽

Absolute Distance ◽

Sinusoidal Phase Modulating

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Absolute distance measurement by wavelength shift interferometry with a laser diode: some systematic error sources

Applied Optics ◽

10.1364/ao.26.001654 ◽

1987 ◽

Vol 26 (9) ◽

pp. 1654 ◽

Cited By ~ 24

Author(s):

Hisao Kikuta ◽

Koichi Iwata ◽

Ryo Nagata

Keyword(s):

Systematic Error ◽

Laser Diode ◽

Distance Measurement ◽

Wavelength Shift ◽

Absolute Distance ◽

Error Sources

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Laser-diode FMCW technique applied to absolute distance measurement

10.1117/12.156280 ◽

1993 ◽

Cited By ~ 1

Author(s):

Mang Cao ◽

Dacheng Li ◽

Yongjun Wu

Keyword(s):

Laser Diode ◽

Distance Measurement ◽

Absolute Distance

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Absolute distance measurement with high accuracy using a laser diode

10.1117/12.156266 ◽

1993 ◽

Author(s):

Xiao-Ming Sun ◽

Xifu Qiang ◽

Mao-Hua Zhu

Keyword(s):

Laser Diode ◽

High Accuracy ◽

Distance Measurement ◽

Absolute Distance

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The study of absolute distance measurement based on the self-mixing interference in laser diode

10.1117/12.835003 ◽

2009 ◽

Author(s):

Ting-ting Wang ◽

Chuang Zhang

Keyword(s):

Laser Diode ◽

Distance Measurement ◽

The Self ◽

Absolute Distance

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Pulsed laser diode optical fiber interferometer for absolute distance measurement

10.1117/12.255370 ◽

1996 ◽

Author(s):

Chunhe Wang ◽

Hai Xiao ◽

Haitao Hong ◽

Shenghua Ye

Keyword(s):

Optical Fiber ◽

Laser Diode ◽

Pulsed Laser ◽

Distance Measurement ◽

Absolute Distance

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Absolute distance measurement interferometry for alignment systems for advanced lithography tools

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.588623 ◽

1996 ◽

Vol 14 (6) ◽

pp. 3960 ◽

Cited By ~ 4

Author(s):

Thomas J. Dunn

Keyword(s):

Distance Measurement ◽

Absolute Distance

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