Absolute distance measurement interferometry for alignment systems for advanced lithography tools

1996 ◽  
Vol 14 (6) ◽  
pp. 3960 ◽  
Author(s):  
Thomas J. Dunn
Keyword(s):  
Distance Measurement ◽  
Absolute Distance

All-fiber linear sampling device for absolute distance measurement

2021 ◽  
Author(s):  
Chunze Wang ◽  
Jiaqi Wang ◽  
Guanyu Liu ◽  
Ziling Wu ◽  
Youjian Song ◽  
...  
Keyword(s):  
Distance Measurement ◽  
Absolute Distance ◽  
Sampling Device ◽  
Linear Sampling

scholarly journals LABORATORY TESTING OF LEICA AT401 LASER TRACKER

2016 ◽  
Vol 56 (2) ◽  
pp. 88 ◽  
Author(s):  
Filip Dvořáček
Keyword(s):  
Laboratory Testing ◽  
Laboratory Tests ◽  
Angle Measurement ◽  
Distance Measurement ◽  
Additive Constant ◽  
Laser Tracker ◽  
Simple Test ◽  
Absolute Distance ◽  
Warm Up ◽  
The Stability

<p>This paper describes laboratory tests on a Leica AT401laser tracker. As the newer Leica AT402 model also uses the same firmware package, most of the results should also be valid for this device. First, we present the instrument’s firmware errors and the software used for testing. The ASME B89.4.19-2006 standard for testing laser trackers is briefly presented. The warm-up effect of the instrument is inspected with respect to both angle measurement and distance measurement. The absolute distance meter (ADM) is compared with a laboratory interferometer on a 30-meter long rail and also on a bench with automated movement of the carriage of the reflector. A time series of measurements for determining the additive constant is evaluated. A simple test of the stability of the distance measurement in field conditions is introduced. Most of the tests were carried out at the Research Institute of Geodesy, Topography and Cartography (RIGTC) and at the Faculty of Civil Engineering (FCE) of the Czech Technical University in Prague (CTU).</p>

scholarly journals SI-traceable absolute distance measurement over more than 800 meters with sub-nanometer interferometry by two-color inline refractivity compensation

2017 ◽  
Vol 111 (19) ◽  
pp. 191104 ◽  
Author(s):  
Karl Meiners-Hagen ◽  
Tobias Meyer ◽  
Jutta Mildner ◽  
Florian Pollinger
Keyword(s):  
Distance Measurement ◽  
Absolute Distance

Interferometry for Absolute Distance Measurement

2011 ◽  
Vol 31 (3) ◽  
pp. 0314001
Author(s):  
李志栋 Li Zhidong ◽  
江月松 Jiang Yuesong ◽  
桑峰 Sang Feng ◽  
王林春 Wang Linchun ◽  
邓士光 Deng Shiguang ◽  
...  
Keyword(s):  
Distance Measurement ◽  
Absolute Distance

All Polarization Maintaining Fiber Based Dual-Comb High Precision Absolute Distance Measurement System

2015 ◽  
Vol 35 (s2) ◽  
pp. s212001
Author(s):  
许立明 Xu Liming ◽  
宋有建 Song Youjian ◽  
梁飞 Liang Fei ◽  
师浩森 Shi Haosen ◽  
胡明列 Hu Minglie ◽  
...  
Keyword(s):  
High Precision ◽  
Measurement System ◽  
Distance Measurement ◽  
Absolute Distance ◽  
Polarization Maintaining Fiber ◽  
Polarization Maintaining

scholarly journals Absolute distance interferometry for subaperture stitching of large freeform optics

2020 ◽  
Vol 238 ◽  
pp. 06011
Author(s):  
Jan Spichtinger ◽  
Michael Schulz ◽  
Gerd Ehret
Keyword(s):  
Measurement System ◽  
Optical Axis ◽  
Distance Measurement ◽  
Fizeau Interferometer ◽  
Absolute Distance ◽  
Local Surface ◽  
Surface Gradient ◽  
Freeform Optics ◽  
The Absolute ◽  
Subaperture Stitching

We are developing a form measurement system for the surfaces of freeform optics and large conventional optics. The specifications of the optics are diameters up to 1.5 m and radii of curvature down to 10 m. This includes optics like telescope mirror segments and synchrotron optics. Using a Fizeau interferometer, we propose a subaperture stitching method that involves vertically aligning the interferometer’s optical axis to the local surface gradient and measuring the absolute distance from the interferometer’s reference flat to the specimen. Experimental results for the absolute distance measurement are shown.

Absolute distance measurement based on spectral interferometer using the effect of the FSR of a Fabry–Perot etalon

2019 ◽  
Vol 123 ◽  
pp. 20-27
Author(s):  
Meiyun Chen ◽  
Shengli Xie ◽  
Guoxu Zhou ◽  
Dong Wei ◽  
Heng Wu ◽  
...  
Keyword(s):  
Distance Measurement ◽  
Absolute Distance ◽  
Fabry Perot
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