Monte Carlo modeling in the low-energy domain of the secondary electron emission of polymethylmethacrylate for critical-dimension scanning electron microscopy
2010 ◽
Vol 9
(2)
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pp. 023001
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2012 ◽
Vol 61
(5)
◽
pp. 261-284
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1994 ◽
Vol 59
(4)
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pp. 349-355
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2009 ◽
Vol 15
(2)
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pp. 125-129
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2010 ◽
Vol 50
(9-11)
◽
pp. 1407-1412
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1970 ◽
Vol 28
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pp. 114-115