Sidewall effect of photomask by scanning electron microscope and optical critical dimension metrology

2005 ◽  
Vol 4 (3) ◽  
pp. 033003 ◽  
Author(s):  
Takeshi Yamane
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Critical Dimension ◽  
Sidewall Effect ◽  
Scanning Electron

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2013 ◽  
Vol 52 (1) ◽  
pp. 881-887
Author(s):  
Y. Huang ◽  
B.-X. Cai ◽  
X.-Y. Meng ◽  
W.-H. Li ◽  
Y.-S. Lin ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Critical Dimension ◽  
Stability Control ◽  
Scanning Electron

Hybrid metrology co-optimization of critical dimension scanning electron microscope and optical critical dimension

2014 ◽  
Vol 13 (4) ◽  
pp. 041413 ◽  
Author(s):  
Alok Vaid ◽  
Carmen Osorio ◽  
Jamie Tsai ◽  
Cornel Bozdog ◽  
Matthew Sendelbach ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Critical Dimension ◽  
Scanning Electron
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