Progress in proximity electron lithography: demonstration of print and overlay performance using the low-energy electron beam proximity-projection lithography β tool

2004 ◽  
Vol 3 (3) ◽  
pp. 402 ◽  
Author(s):  
Shinji Omori
Keyword(s):  
Electron Beam ◽  
Low Energy ◽  
Energy Electron ◽  
Projection Lithography ◽  
Low Energy Electron ◽  
Electron Lithography

New mask format for low-energy electron-beam proximity projection lithography

2002 ◽  
Author(s):  
Kaoru Koike ◽  
Shinji Omori ◽  
Kazuya Iwase ◽  
Isao Ashida ◽  
Shigeru Moriya
Keyword(s):  
Electron Beam ◽  
Low Energy ◽  
Energy Electron ◽  
Projection Lithography ◽  
Low Energy Electron

Performance of beta tool for low-energy electron-beam proximity-projection lithography (LEEPL)

2003 ◽  
Author(s):  
Akira Yoshida ◽  
Haruo Kasahara ◽  
Akira Higuchi ◽  
Hiroshi Nozue ◽  
Akihiro Endo ◽  
...  
Keyword(s):  
Electron Beam ◽  
Low Energy ◽  
Energy Electron ◽  
Projection Lithography ◽  
Low Energy Electron

Imaging capability of low-energy electron-beam proximity-projection lithography toward the 65/45-nm node

2003 ◽  
Author(s):  
Hiroyuki Nakano ◽  
Shinichiro Nohdo ◽  
Kumiko Oguni ◽  
Tomonori Motohashi ◽  
Masaki Yoshizawa ◽  
...  
Keyword(s):  
Electron Beam ◽  
Low Energy ◽  
Energy Electron ◽  
Imaging Capability ◽  
Projection Lithography ◽  
Low Energy Electron

scholarly journals Present Status of Exposure Tool Development for Low Energy Electron-beam Proximity Projection Lithography.

2002 ◽  
Vol 15 (3) ◽  
pp. 403-409 ◽  
Author(s):  
Akihiro Endo ◽  
Akira Higuchi ◽  
Haruo Kasahara ◽  
Hiroshi Nozue ◽  
Nobuo Shimazu ◽  
...  
Keyword(s):  
Electron Beam ◽  
Present Status ◽  
Low Energy ◽  
Energy Electron ◽  
Tool Development ◽  
Projection Lithography ◽  
Low Energy Electron

Imaging capability of low-energy electron-beam proximity projection lithography toward the 70-nm node

2002 ◽  
Author(s):  
Hiroyuki Nakano ◽  
Kumiko Oguni ◽  
Shinichiro Nohdo ◽  
Kaoru Koike ◽  
Shigeru Moriya
Keyword(s):  
Electron Beam ◽  
Low Energy ◽  
Energy Electron ◽  
Imaging Capability ◽  
Projection Lithography ◽  
Low Energy Electron
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