Large-field particle beam optics for projection and proximity printing and for maskless lithography

2003 ◽  
Vol 2 (1) ◽  
pp. 34 ◽  
Author(s):  
Hans Loeschner
Keyword(s):  
Particle Beam ◽  
Large Field ◽  
Maskless Lithography ◽  
Beam Optics

scholarly journals Design and Principles of Synchrotrons and Circular Colliders

2020 ◽  
pp. 205-294
Author(s):  
B. J. Holzer ◽  
B. Goddard ◽  
Werner Herr ◽  
Bruno Muratori ◽  
L. Rivkin ◽  
...  
Keyword(s):  
Particle Beam ◽  
Beam Optics ◽  
Design And Optimization ◽  
Lattice Design ◽  
Link Type

AbstractLattice design in the context we will describe it here is the design and optimization of the principle elements—the lattice cells—of a circular accelerator, and it includes the dedicated variation of the accelerator elements (as for example position and strength of the magnets in the machine) to obtain well defined and predictable parameters of the stored particle beam. It is therefore closely related to the theory of linear beam optics that has been described in Chap. 10.1007/978-3-030-34245-6_2 [1].

scholarly journals Using MARYLIE with the Particle Beam Optics Laboratory

2003 ◽  
Author(s):  
G.H. Gillespie ◽  
B.W. Hill ◽  
H. Martono ◽  
J.M. Moore ◽  
A.J. Dragt
Keyword(s):  
Particle Beam ◽  
Beam Optics

Large-field ion optics for projection and proximity printing and for maskless lithography (ML2)

2002 ◽  
Author(s):  
Hans Loeschner ◽  
Gerhard Stengl ◽  
Herbert Buschbeck ◽  
A. Chalupka ◽  
Gertraud Lammer ◽  
...  
Keyword(s):  
Large Field ◽  
Maskless Lithography ◽  
Ion Optics
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