Effect of nonvertical ion bombardment due to edge effects on polymer surface morphology evolution and etching uniformity
2021 ◽
Vol 39
(4)
◽
pp. 043001
Keyword(s):
2017 ◽
Vol 409
◽
pp. 158-162
◽
2016 ◽
Vol 478
◽
pp. 287-294
◽
Keyword(s):
Keyword(s):