Focus ring geometry influence on wafer edge voltage distribution for plasma processes

2021 ◽  
Vol 39 (4) ◽  
pp. 043006
Author(s):  
Yuhua Xiao ◽  
Yao Du ◽  
Carl Smith ◽  
Sang Ki Nam ◽  
Hoki Lee ◽  
...  
Keyword(s):  
Voltage Distribution ◽  
Ring Geometry ◽  
Wafer Edge

New Detection Method for an Insulation Level Monitoring Device Used in Low-Voltage Distribution Lines

2016 ◽  
Vol 136 (11) ◽  
pp. 878-883 ◽  
Author(s):  
Kazunori Nishimura ◽  
Yusaku Marui ◽  
Satonori Nishimura ◽  
Wataru Sunayama
Keyword(s):  
Detection Method ◽  
Low Voltage ◽  
Monitoring Device ◽  
Voltage Distribution ◽  
Distribution Lines ◽  
Level Monitoring

Development and Evaluation of a Fast Voltage Calculation Method for Low-Voltage Distribution System

2013 ◽  
Vol 133 (4) ◽  
pp. 343-349
Author(s):  
Shunsuke Kawano ◽  
Yasuhiro Hayashi ◽  
Nobuhiko Itaya ◽  
Tomihiro Takano ◽  
Tetsufumi Ono
Keyword(s):  
Calculation Method ◽  
Distribution System ◽  
Low Voltage ◽  
Voltage Distribution

Development of Automatic Voltage Regulator for Low Voltage Distribution Systems

2012 ◽  
Vol 132 (5) ◽  
pp. 436-444 ◽  
Author(s):  
Katsuhiro Matsuda ◽  
Kazuhiro Horikoshi ◽  
Toshiyuki Seto ◽  
Osamu Iyama ◽  
Hiromu Kobayashi
Keyword(s):  
Distribution Systems ◽  
Low Voltage ◽  
Voltage Regulator ◽  
Voltage Distribution ◽  
Automatic Voltage Regulator
Sign in / Sign up

Export Citation Format

Share Document