Numerical analysis of pattern shape deformation in UV imprint considering thermal deformation with UV shrinkage and curing

Author(s):  
Yuki Onishi ◽  
Ryunosuke Yamashita ◽  
Kenji Amaya ◽  
Yoshihiko Hirai
2020 ◽  
Vol 33 (2) ◽  
pp. 245-250
Author(s):  
Yuki Onishi ◽  
Ryunosuke Yamashita ◽  
Kenji Amaya ◽  
Yoshihiko Hirai

1995 ◽  
Vol 38 (1) ◽  
pp. 92-99
Author(s):  
Takeo Fukushima ◽  
Kenichi Yanagi ◽  
Kazumasa Mihara ◽  
Ritsuo Hashimoto ◽  
Keiji Mizuta ◽  
...  

2016 ◽  
Vol 2016.24 (0) ◽  
pp. 431
Author(s):  
Ryo AKAMATSU ◽  
Toshi-Taka IKESHOJI ◽  
Masahiro ARAKI ◽  
Makiko YONEHARA ◽  
Kazuya NAMAMURA ◽  
...  

1998 ◽  
Author(s):  
Daniel Holstein ◽  
Petra Aswendt ◽  
Roland Hoefling ◽  
Claus-Dieter Schmidt ◽  
Werner P. O. Jueptner

2010 ◽  
Vol 129-131 ◽  
pp. 968-972
Author(s):  
Xiao Dong Yang ◽  
Jun Peng Shao ◽  
Xiao Qiu Xu ◽  
Yun Fei Wang ◽  
Chao Yin ◽  
...  

According to the structure of workbench and base of heavy hydrostatic bearing which is applied in heavy equipment, thermal deformation equations of the structure are deduced and boundary conditions for numerical simulation are established based on thermal elasticity theory. Then thermal deformation of hydrostatic bearing without load is calculated at different velocity. The results indicate that: temperature and velocity impacts a significant influence on thermal deformation of hydrostatic bearing. Thermal deformation increases as the velocity increases; workbench up-warps severely, oil-pad inclines towards outside to a certain extent, which results in the lubrication clearance emerges as wedge-shape deformation. The conclusions from thermal deformation calculation could provide theoretical basis for structure design of hydrostatic bearing and ravel out the thermal deformation problem.


2011 ◽  
Vol 70 ◽  
pp. 399-404
Author(s):  
Wei Chung Wang ◽  
Ting Ying Wu

In this paper, the electronic speckle pattern interferometry (ESPI) and the finite element method (FEM) were used to obtain the thermal deformation induced in a centrally supported thermoelectric cooler (TEC). The results of ESPI and FEM are in good agreement and show that the warpage varies linearly with respect to the temperature difference between the two ceramic plates inside the TEC.


2008 ◽  
Vol 389-390 ◽  
pp. 114-119 ◽  
Author(s):  
Hiroyuki Hasegawa ◽  
Suritalatu ◽  
Moriaki Sakakura ◽  
Shinya Tsukamoto

During the last decades, heat generation in grinding is one of the top concerns because high temperature under fabrication leads to less dimensional accuracy of a workpiece. Several studies with regard to grinding heat have been carried out, focused on micro phenomena of abrasive grains or macro phenomena of thermal deformation in grinding machines. However, these researches have been extensive, schematized information such as thermal deformation, and grinding temperature is indispensable for practical applications. In this study, we combined the simulation model of the plunge grinding process and the numerical analysis method with the differencing technique for the non-steady heat conduction problem, and have constructed the simulation technique for analyzing the heat problem in the workpiece. The simulation results provided information of the heat conduction, and the thermal deformation of the workpiece.


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