Numerical analysis of pattern shape deformation in UV imprint considering thermal deformation with UV shrinkage and curing
2021 ◽
Vol 39
(2)
◽
pp. 024002
2020 ◽
Vol 33
(2)
◽
pp. 245-250
2016 ◽
Vol 2016.24
(0)
◽
pp. 431
2010 ◽
Vol 129-131
◽
pp. 968-972
2011 ◽
Vol 70
◽
pp. 399-404
2008 ◽
Vol 389-390
◽
pp. 114-119
◽