Replica molding of cicada wings: The role of water at point of synthesis on nanostructure feature size

2020 ◽  
Vol 15 (6) ◽  
pp. 061017
Author(s):  
Shauna P. Flynn ◽  
Stephen Daniels ◽  
Brian J. Rodriguez ◽  
Susan M. Kelleher
Keyword(s):  
Feature Size ◽  
Replica Molding

Investigation of Correlation between Polishing Characteristic and Pad Roughness during Chemical Mechanical Planarization Process

2012 ◽  
Vol 488-489 ◽  
pp. 831-835
Author(s):  
Hojoong Kim ◽  
Andy Kim ◽  
Tae Sung Kim
Keyword(s):  
Integrated Circuit ◽  
Material Removal ◽  
Removal Rate ◽  
Chemical Mechanical Planarization ◽  
Life Time ◽  
Feature Size ◽  
3 Dimensional ◽  
Planarization Process ◽  
Scanning Electron

The Chemical mechanical planarization (CMP) process has become a primary planarization technique required for the manufacture of advanced integrated circuit (IC) devices. As the feature size of IC chips shrinks down to 65 nm and below, the role of CMP as a robust planarization process becomes increasingly important. In this work, we evaluated surface roughness of CMP pad to correlate the roughness with CMP performance such as material removal rate (MRR) and pad lifetime. Pad surface was analyzed by 3-dimensional profiler and scanning electron microscope (SEM). We found that MRR could be varied with the pad life time and roughness. We also found that suitable roughness range is exist to get stable CMP performance. Finally, we introduced ‘pre-conditioning’ method to manage the roughness of CMP pad to get stable CMP performance at the initial pad life time.

An Exploration of the Copper CMP Removal Mechanism

1999 ◽  
Vol 566 ◽  
Author(s):  
Peter Renteln ◽  
Ton Ninh
Keyword(s):  
Oxidation Reaction ◽  
Removal Rate ◽  
The Body ◽  
Generation Process ◽  
Removal Mechanism ◽  
Process Technology ◽  
Feature Size ◽  
Copper Cmp ◽  
Kinetics Of

Copper CMP is emerging as the next generation process technology enabling feature size reduction to .15μm and beyond[1]. We propose a copper removal mechanism in the context of a slurry consisting of an oxidizer and an abrasive. The body of evidence suggests that we are polishing in an oxidation complex rate limited regime. We observed low removal rate of copper in the absence of either oxidizer or abrasive, but rate was still dependent on CMP parameters and strongly tied to temperature. Any proposed mechanism must explain the observed dependence of rate on CMP aggressiveness and the role of each of the components. For the slurry used in this work we propose that an increase in temperature resulting from an increase in CMP intensity drives the kinetics of the oxidation reaction, and that the removal process can be classified as temperature-activated, abrasion assisted dissolution.

Fabrication of Polymer Micro-Patterns by Transient Thermolithography with Thickness Control

2014 ◽  
Vol 893 ◽  
pp. 679-682
Author(s):  
Jung Chao Hsu ◽  
Jui Chieh Chen ◽  
Ming Tsung Hung
Keyword(s):  
Diffraction Limit ◽  
Crosslinking Reaction ◽  
Transient Heating ◽  
Feature Size ◽  
Pulsed Heating ◽  
Transport Distance ◽  
Exposure Source ◽  
Different Thickness ◽  
Micro Patterns

Thermolithography uses heat as the exposure source which has the possibility to generate patterns with minimum feature size exceeding the diffraction limit in photolithography. In addition, heat transport is much slower than light which allows us to control the transport distance. In this manuscript, we use transient heating to generate micro patterns of polymer resist with different thickness. The experiments use thin film micro-heaters with pulsed heating. Different pulse widths and periods are used to control the temperature rises and accumulated heating durations. The trend of the resulting resist thicknesses reveals the important role of the relaxation time in the crosslinking reaction.

Role of dactinomycin in the improved survival of children with Wilms' tumor

JAMA ◽  
1966 ◽  
Vol 195 (12) ◽  
pp. 1005-1009 ◽  
Author(s):  
D. J. Fernbach
Keyword(s):  
Wilms Tumor

Role of the allergist in diagnosis and management of patients with uveitis

JAMA ◽  
1966 ◽  
Vol 195 (3) ◽  
pp. 167-172 ◽  
Author(s):  
T. E. Van Metre
Keyword(s):  
Diagnosis And Management

The power of norms to sway fused group members

2018 ◽  
Vol 41 ◽  
Author(s):  
Winnifred R. Louis ◽  
Craig McGarty ◽  
Emma F. Thomas ◽  
Catherine E. Amiot ◽  
Fathali M. Moghaddam
Keyword(s):  
Evolutionary Anthropology ◽  
Normative Systems ◽  
Violent Extremism ◽  
Identity Fusion ◽  
Group Members

AbstractWhitehouse adapts insights from evolutionary anthropology to interpret extreme self-sacrifice through the concept of identity fusion. The model neglects the role of normative systems in shaping behaviors, especially in relation to violent extremism. In peaceful groups, increasing fusion will actually decrease extremism. Groups collectively appraise threats and opportunities, actively debate action options, and rarely choose violence toward self or others.

Elaborating the role of reflection and individual differences in the study of folk-economic beliefs

2018 ◽  
Vol 41 ◽  
Author(s):  
Kevin Arceneaux
Keyword(s):  
Decision Making ◽  
Individual Differences ◽  
Cognitive Processes ◽  
Evolutionary History ◽  
Behavioral Responses ◽  
History Of ◽  
Economic Beliefs

AbstractIntuitions guide decision-making, and looking to the evolutionary history of humans illuminates why some behavioral responses are more intuitive than others. Yet a place remains for cognitive processes to second-guess intuitive responses – that is, to be reflective – and individual differences abound in automatic, intuitive processing as well.

The role of affect in feelings of obligation

2020 ◽  
Vol 43 ◽  
Author(s):  
Stefen Beeler-Duden ◽  
Meltem Yucel ◽  
Amrisha Vaish
Keyword(s):  
Positive Emotions ◽  
The Creation ◽  
Sense Of Obligation

Abstract Tomasello offers a compelling account of the emergence of humans’ sense of obligation. We suggest that more needs to be said about the role of affect in the creation of obligations. We also argue that positive emotions such as gratitude evolved to encourage individuals to fulfill cooperative obligations without the negative quality that Tomasello proposes is inherent in obligations.

Refining our understanding of the “elephant in the room”

2020 ◽  
Vol 43 ◽  
Author(s):  
Andrew Whiten
Keyword(s):  
Social Cognition ◽  
Cultural Evolution ◽  
Cognitive Abilities ◽  
Critical Factors ◽  
Technological Culture

Abstract The authors do the field of cultural evolution a service by exploring the role of non-social cognition in human cumulative technological culture, truly neglected in comparison with socio-cognitive abilities frequently assumed to be the primary drivers. Some specifics of their delineation of the critical factors are problematic, however. I highlight recent chimpanzee–human comparative findings that should help refine such analyses.

Choosing a Markov blanket

2020 ◽  
Vol 43 ◽  
Author(s):  
Thomas Parr
Keyword(s):  
Markov Blanket ◽  
Target Article ◽  
The Relationship

Abstract This commentary focuses upon the relationship between two themes in the target article: the ways in which a Markov blanket may be defined and the role of precision and salience in mediating the interactions between what is internal and external to a system. These each rest upon the different perspectives we might take while “choosing” a Markov blanket.

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