Atomic layer deposition of ruthenium using an ABC-type process: Role of oxygen exposure during nucleation
2020 ◽
Vol 38
(6)
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pp. 062402
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2018 ◽
Vol 36
(6)
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pp. 06A105
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2019 ◽
Vol 35
(7)
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pp. 720-731
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2019 ◽
Vol 477
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pp. 280-284
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2019 ◽
Vol 133
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pp. 487-493
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2019 ◽
Vol 11
(29)
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pp. 26277-26287
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