scholarly journals Boron liquid metal alloy ion sources for special focused ion beam applications

2020 ◽  
Vol 38 (4) ◽  
pp. 042801 ◽  
Author(s):  
Lothar Bischoff ◽  
Nico Klingner ◽  
Paul Mazarov ◽  
Wolfgang Pilz ◽  
Fabian Meyer
Keyword(s):  
Liquid Metal ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Ion Sources ◽  
Metal Alloy ◽  
Liquid Metal Alloy

Influence of ion species of AuSi liquid metal alloy source-focused ion beam on SiO2/Si nanopatterning

2019 ◽  
Vol 669 ◽  
pp. 215-219
Author(s):  
A. Aissat ◽  
F. Benyettou ◽  
I. Berbezier ◽  
J.P. Vilcot
Keyword(s):  
Liquid Metal ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Metal Alloy ◽  
Liquid Metal Alloy ◽  
Ion Species

scholarly journals Imaging and milling resolution of light ion beams from helium ion microscopy and FIBs driven by liquid metal alloy ion sources

2020 ◽  
Vol 11 ◽  
pp. 1742-1749
Author(s):  
Nico Klingner ◽  
Gregor Hlawacek ◽  
Paul Mazarov ◽  
Wolfgang Pilz ◽  
Fabian Meyer ◽  
...  
Keyword(s):  
Liquid Metal ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Ion Beams ◽  
Ion Source ◽  
Metal Alloy ◽  
Gas Field ◽  
Helium Ion ◽  
Liquid Metal Alloy ◽  
Ion Species

While the application of focused ion beam (FIB) techniques has become a well-established technique in research and development for patterning and prototyping on the nanometer scale, there is still a large underused potential with respect to the usage of ion species other than gallium. Light ions in the range of m = 1–28 u (hydrogen to silicon) are of increasing interest due to the available high beam resolution in the nanometer range and their special chemical and physical behavior in the substrate. In this work, helium and neon ion beams from a helium ion microscope are compared with ion beams such as lithium, beryllium, boron, and silicon, obtained from a mass-separated FIB using a liquid metal alloy ion source (LMAIS) with respect to the imaging and milling resolution, as well as the current stability. Simulations were carried out to investigate whether the experimentally smallest ion-milled trenches are limited by the size of the collision cascade. While He+ offers, experimentally and in simulations, the smallest minimum trench width, light ion species such as Li+ or Be+ from a LMAIS offer higher milling rates and ion currents while outperforming the milling resolution of Ne+ from a gas field ion source. The comparison allows one to select the best possible ion species for the specific demands in terms of resolution, beam current, and volume to be drilled.

Ultimate nanopatterning of Si substrate using filtered liquid metal alloy ion source-focused ion beam

2013 ◽  
Vol 543 ◽  
pp. 69-73 ◽  
Author(s):  
A. Benkouider ◽  
I. Berbezier ◽  
A. Ronda ◽  
L. Favre ◽  
E. Ruiz Gomes ◽  
...  
Keyword(s):  
Liquid Metal ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Ion Source ◽  
Metal Alloy ◽  
Si Substrate ◽  
Liquid Metal Alloy

Liquid metal alloy ion sources—An alternative for focussed ion beam technology

2016 ◽  
Vol 3 (2) ◽  
pp. 021101 ◽  
Author(s):  
Lothar Bischoff ◽  
Paul Mazarov ◽  
Lars Bruchhaus ◽  
Jacques Gierak
Keyword(s):  
Liquid Metal ◽  
Ion Beam ◽  
Ion Sources ◽  
Metal Alloy ◽  
Liquid Metal Alloy ◽  
Focussed Ion Beam

Temperature dependence of the electric characteristics of liquid metal alloy ion sources

2000 ◽  
Vol 33 (6) ◽  
pp. 692-695 ◽  
Author(s):  
L Bischoff ◽  
J Teichert ◽  
Th Ganetsos ◽  
G L R Mair
Keyword(s):  
Liquid Metal ◽  
Temperature Dependence ◽  
Ion Sources ◽  
Metal Alloy ◽  
Liquid Metal Alloy
Sign in / Sign up

Export Citation Format

Share Document