Liquid metal alloy ion sources—An alternative for focussed ion beam technology

2016 ◽  
Vol 3 (2) ◽  
pp. 021101 ◽  
Author(s):  
Lothar Bischoff ◽  
Paul Mazarov ◽  
Lars Bruchhaus ◽  
Jacques Gierak
Keyword(s):  
Liquid Metal ◽  
Ion Beam ◽  
Ion Sources ◽  
Metal Alloy ◽  
Liquid Metal Alloy ◽  
Focussed Ion Beam

Temperature dependence of the electric characteristics of liquid metal alloy ion sources

2000 ◽  
Vol 33 (6) ◽  
pp. 692-695 ◽  
Author(s):  
L Bischoff ◽  
J Teichert ◽  
Th Ganetsos ◽  
G L R Mair
Keyword(s):  
Liquid Metal ◽  
Temperature Dependence ◽  
Ion Sources ◽  
Metal Alloy ◽  
Liquid Metal Alloy

Influence of ion species of AuSi liquid metal alloy source-focused ion beam on SiO2/Si nanopatterning

2019 ◽  
Vol 669 ◽  
pp. 215-219
Author(s):  
A. Aissat ◽  
F. Benyettou ◽  
I. Berbezier ◽  
J.P. Vilcot
Keyword(s):  
Liquid Metal ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Metal Alloy ◽  
Liquid Metal Alloy ◽  
Ion Species

B, Sb and Si Liquid Metal Alloy Ion Sources for Submicron Fabrication

1982 ◽  
Vol 21 (S1) ◽  
pp. 415 ◽  
Author(s):  
Kenji Gamo ◽  
Yasumasa Inomoto ◽  
Yukinori Ochiai ◽  
Susumu Namba
Keyword(s):  
Liquid Metal ◽  
Ion Sources ◽  
Metal Alloy ◽  
Liquid Metal Alloy
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