Defect observation on a 12-in. silicon wafer using large sample atomic force microscopy

2000 ◽  
Vol 18 (3) ◽  
pp. 1190
Author(s):  
T. Nishimura ◽  
S. Wakiyama ◽  
M. Yasutake ◽  
Y. Sugano ◽  
N. Fujino
Keyword(s):  
Atomic Force Microscopy ◽  
Silicon Wafer ◽  
Large Sample ◽  
Force Microscopy ◽  
Atomic Force

AFM Methodology for the Measurement of Silicon Wafer Microroughness

1996 ◽  
Vol 440 ◽  
Author(s):  
A.G. Gilicinski ◽  
S.E. Beck ◽  
R.M. Rynders ◽  
D.A. Moniot
Keyword(s):  
Atomic Force Microscopy ◽  
Spectral Density ◽  
Silicon Wafer ◽  
Power Spectral Density ◽  
Cutoff Frequency ◽  
Force Microscopy ◽  
Atomic Force ◽  
Experimental Solution ◽  
Power Spectral ◽  
Afm Probe

AbstractDespite the growing use of atomic force microscopy (AFM) for the measurement of silicon wafer microroughness, no generally accepted method has been developed to deal with issues around accuracy and reproducibility. We review problems that affect these AFM studies and demonstrate the effect of probe tip size on AFM microroughness data. Without knowledge of AFM probe tip geometry, it is impossible to quantitatively compare Ra or RMS microroughness data between different measurements. An experimental solution is to characterize tip sizes during imaging and compare data taken with similar size tips. While this will significantly improve quantitation, it is restrictive in that data taken with different size tips cannot be easily compared. We propose a solution to this problem in the use of power spectral density (PSD) to evaluate microroughness with a “cutoff frequency” at the lateral wavelength where tip effects begin to affect the accuracy of the microroughness measurement. An example of this approach is described

CHARACTERIZATION OF SILICON WAFER SURFACES AFTER HYDROPHILIC AND HYDROPHOBIC TREATMENTS BY ATOMIC FORCE MICROSCOPY

2010 ◽  
Author(s):  
Xiaoning Xi ◽  
Jinjie Shi ◽  
Sahar Maghsoudy-Louyeh ◽  
Bernhard R. Tittmann ◽  
Donald O. Thompson ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Silicon Wafer ◽  
Force Microscopy ◽  
Atomic Force ◽  
Wafer Surfaces
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