Single layer chemical vapor deposition photoresist for 193 nm deep ultraviolet photolithography

1998 ◽  
Vol 16 (6) ◽  
pp. 3730 ◽  
Author(s):  
Mike Nault
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Single Layer ◽  
Chemical Vapor ◽  
Deep Ultraviolet ◽  
193 Nm

Hybrid single-layer/bulk tungsten diselenide transistors by lithographic encoding of material thickness in chemical vapor deposition

2D Materials ◽  
2018 ◽  
Vol 6 (1) ◽  
pp. 015017 ◽  
Author(s):  
Ingrid Liao ◽  
David Barroso ◽  
Ariana E Nguyen ◽  
Natalie Duong ◽  
Quinten B Yurek ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Single Layer ◽  
Chemical Vapor ◽  
Tungsten Diselenide ◽  
Material Thickness

scholarly journals Correction: Direct chemical vapor deposition synthesis of large area single-layer brominated graphene

RSC Advances ◽  
2019 ◽  
Vol 9 (28) ◽  
pp. 16057-16057
Author(s):  
Maria Hasan ◽  
Wang Meiou ◽  
Liu Yulian ◽  
Sami Ullah ◽  
Huy Q. Ta ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Single Layer ◽  
Chemical Vapor ◽  
Large Area

Correction for ‘Direct chemical vapor deposition synthesis of large area single-layer brominated graphene’ by Maria Hasan et al., RSC Adv., 2019, 9, 13527–13532.

Epitaxial Chemical Vapor Deposition Growth of Single-Layer Graphene over Cobalt Film Crystallized on Sapphire

ACS Nano ◽  
2010 ◽  
Vol 4 (12) ◽  
pp. 7407-7414 ◽  
Author(s):  
Hiroki Ago ◽  
Yoshito Ito ◽  
Noriaki Mizuta ◽  
Kazuma Yoshida ◽  
Baoshan Hu ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Single Layer ◽  
Chemical Vapor ◽  
Single Layer Graphene ◽  
Chemical Vapor Deposition Growth ◽  
Cobalt Film ◽  
Layer Graphene

Photoelectron Spectroscopic Imaging and Device Applications of Large-Area Patternable Single-Layer MoS2Synthesized by Chemical Vapor Deposition

ACS Nano ◽  
2014 ◽  
Vol 8 (5) ◽  
pp. 4961-4968 ◽  
Author(s):  
Woanseo Park ◽  
Jaeyoon Baik ◽  
Tae-Young Kim ◽  
Kyungjune Cho ◽  
Woong-Ki Hong ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Single Layer ◽  
Chemical Vapor ◽  
Spectroscopic Imaging ◽  
Large Area ◽  
Device Applications

scholarly journals Direct growth of single-layer terminated vertical graphene array on germanium by plasma enhanced chemical vapor deposition

Carbon ◽  
2019 ◽  
Vol 155 ◽  
pp. 320-325 ◽  
Author(s):  
Abdulrahman Al-Hagri ◽  
Ru Li ◽  
Nitul S. Rajput ◽  
Jin-You Lu ◽  
Shan Cong ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Single Layer ◽  
Chemical Vapor ◽  
Direct Growth

Performance of single layer graphene obtain by chemical vapor deposition on gold electrodes

2019 ◽  
Vol 98 ◽  
pp. 107510 ◽  
Author(s):  
Bianca Tincu ◽  
Ioana Demetrescu ◽  
Andrei Avram ◽  
Vasilica Tucureanu ◽  
Alina Matei ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Single Layer ◽  
Chemical Vapor ◽  
Single Layer Graphene ◽  
Gold Electrodes ◽  
Layer Graphene
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