Model calculations of internal field emission and J–V characteristics of a composite n-Si and N–diamond cold cathode source

Author(s):  
Peter Lerner
1998 ◽  
Author(s):  
Weibiao Wang ◽  
Changchun Jin ◽  
Hong Ji ◽  
Guang Yuan ◽  
Zhengshen Chu ◽  
...  

Author(s):  
T. Miyokawa ◽  
S. Norioka ◽  
S. Goto

Field emission SEMs (FE-SEMs) are becoming popular due to their high resolution needs. In the field of semiconductor product, it is demanded to use the low accelerating voltage FE-SEM to avoid the electron irradiation damage and the electron charging up on samples. However the accelerating voltage of usual SEM with FE-gun is limited until 1 kV, which is not enough small for the present demands, because the virtual source goes far from the tip in lower accelerating voltages. This virtual source position depends on the shape of the electrostatic lens. So, we investigated several types of electrostatic lenses to be applicable to the lower accelerating voltage. In the result, it is found a field emission gun with a conical anode is effectively applied for a wide range of low accelerating voltages.A field emission gun usually consists of a field emission tip (cold cathode) and the Butler type electrostatic lens.


1981 ◽  
Author(s):  
Duncan Stewart ◽  
Vivian G. Rivlin ◽  
Paul D. Wilson

2014 ◽  
Vol 61 (6) ◽  
pp. 1771-1775 ◽  
Author(s):  
Yu Zhang ◽  
Deliu Deng ◽  
Lijun Zhu ◽  
Shaozhi Deng ◽  
Jun Chen ◽  
...  

Author(s):  
Masahiro Yamashita ◽  
Yuji Asada ◽  
Tomohiko Yamakami ◽  
Rinpei Hayashibe ◽  
Kiichi Kamimura

Author(s):  
Victor Rogelio Barrales-Guadarrama ◽  
Meliton Ezequiel Rodriguez-Rodriguez ◽  
Raymundo Barrales-Guadarrama ◽  
Ernesto Rodrigo Vazquez-Ceron

Sign in / Sign up

Export Citation Format

Share Document