Factors affecting two-dimensional dopant profiles obtained by transmission electron microscopy of etched p-n junctions in Si
1998 ◽
Vol 16
(1)
◽
pp. 471
◽
2020 ◽
Vol 124
(27)
◽
pp. 14935-14940
2011 ◽
Vol 2
(9)
◽
pp. 1082-1087
◽
2019 ◽
Vol 123
(45)
◽
pp. 27843-27853
◽