Optical determination of shallow carrier profiles using Fourier transform infrared ellipsometry
1998 ◽
Vol 16
(1)
◽
pp. 312
◽
1994 ◽
Vol 261
(1)
◽
pp. 163-172
◽
2004 ◽
Vol 502
(2)
◽
pp. 213-220
◽
1986 ◽
Vol 861
◽
pp. 16-24
◽
1998 ◽
Vol 16
(1)
◽
pp. 225-232
◽