scholarly journals Investigations of the surface chemistry of silicon substrates etched in a rf-biased inductively coupled fluorocarbon plasma using Fourier-transform infrared ellipsometry

1998 ◽  
Vol 16 (1) ◽  
pp. 225-232 ◽  
Author(s):  
G. M. W. Kroesen ◽  
Ho-Jun Lee ◽  
Hiroshi Moriguchi ◽  
Hideki Motomura ◽  
Tatsuru Shirafuji ◽  
...  
Keyword(s):  
Fourier Transform ◽  
Surface Chemistry ◽  
Fourier Transform Infrared ◽  
Silicon Substrates ◽  
Inductively Coupled ◽  
Infrared Ellipsometry ◽  
Fluorocarbon Plasma

Fourier transform infrared ellipsometry of thin polymer films

1986 ◽  
Vol 58 (1) ◽  
pp. 64-68 ◽  
Author(s):  
Robert T. Graf ◽  
Jack L. Koenig ◽  
Hatsuo. Ishida
Keyword(s):  
Fourier Transform ◽  
Polymer Films ◽  
Fourier Transform Infrared ◽  
Thin Polymer Films ◽  
Infrared Ellipsometry ◽  
Thin Polymer

Characterization of Photoluminescence and Surface Chemistry after Annealing about Si:SiO2 Films Fabricated by Radio Frequency Sputtering

2016 ◽  
Vol 698 ◽  
pp. 13-18 ◽  
Author(s):  
Koichi Tanaka ◽  
Taichi Yoshida
Keyword(s):  
Fourier Transform ◽  
Infrared Spectroscopy ◽  
Surface Chemistry ◽  
Radio Frequency ◽  
Fourier Transform Infrared Spectroscopy ◽  
Annealing Temperature ◽  
Fourier Transform Infrared ◽  
Radio Frequency Sputtering ◽  
The Fourier Transform

We fabricated Si:SiO2 films and assessed its characterization of photoluminescence and surface chemistry. When Si tablets on a SiO2 target were sputtered in a chamber of a radio frequency sputtering device, Si:SiO2 films were deposited on a substrate. When the films were excited by a He-Cd laser, photoluminescence having wide and continuous peaks was emitted in shorter region than 600 nm. After annealing, intensity of photoluminescence changed, which depends on annealing temperature and time. By the Fourier Transform InfraRed Spectroscopy, bonds of atoms around Si were investigated.

Application of Fourier transform infrared ellipsometry to assess the concentration of biological molecules

2002 ◽  
Vol 41 (34) ◽  
pp. 7339 ◽  
Author(s):  
Enric Garcia-Caurel ◽  
Bernard Drévillon ◽  
Antonello De Martino ◽  
Laurent Schwartz
Keyword(s):  
Fourier Transform ◽  
Fourier Transform Infrared ◽  
Biological Molecules ◽  
Infrared Ellipsometry
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