Characterization of electrical damage induced by CH4/H2 reactive ion etching of molecular beam epitaxial InAlAs
1996 ◽
Vol 14
(4)
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pp. 2555
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Keyword(s):
2020 ◽
Vol 38
(6)
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pp. 062804
Keyword(s):
1988 ◽
Vol 6
(2)
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pp. 703
◽
1998 ◽
Vol 37
(Part 1, No. 1)
◽
pp. 39-44
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Keyword(s):