High-brightness ion source for ion projection lithography

1996 ◽  
Vol 14 (6) ◽  
pp. 3907 ◽  
Author(s):  
S. K. Guharay
Keyword(s):  
Ion Source ◽  
High Brightness ◽  
Projection Lithography ◽  
Ion Projection Lithography

Surface plasma source to generate high‐brightness H− beams for ion projection lithography (abstract)a)

1996 ◽  
Vol 67 (3) ◽  
pp. 927-927 ◽  
Author(s):  
V. G. Dudnikov ◽  
G. E. Derevyankin ◽  
D. V. Kovalevsky ◽  
V. Ya. Savkin ◽  
E. A. Sokolovsky ◽  
...  
Keyword(s):  
Plasma Source ◽  
Surface Plasma ◽  
High Brightness ◽  
Projection Lithography ◽  
Ion Projection Lithography

Low‐divergence, high‐brightness lithium ion source for plasma diagnostics

1988 ◽  
Vol 59 (8) ◽  
pp. 1735-1737 ◽  
Author(s):  
D. M. Thomas ◽  
W. P. West ◽  
K. McCormick
Keyword(s):  
Plasma Diagnostics ◽  
Lithium Ion ◽  
Ion Source ◽  
High Brightness

Ion projection lithography for resistless patterning of thin magnetic films

2000 ◽  
Vol 53 (1-4) ◽  
pp. 605-608 ◽  
Author(s):  
W.H. Bruenger ◽  
M. Torkler ◽  
C. Dzionk ◽  
B.D. Terris ◽  
L. Folks ◽  
...  
Keyword(s):  
Magnetic Films ◽  
Projection Lithography ◽  
Thin Magnetic Films ◽  
Ion Projection Lithography

Wafer stage assembly for ion projection lithography

2001 ◽  
Vol 57-58 ◽  
pp. 181-185 ◽  
Author(s):  
Christoph Damm ◽  
Thomas Peschel ◽  
Stephan Risse ◽  
Ulf C. Kirschstein
Keyword(s):  
Projection Lithography ◽  
Ion Projection Lithography

Resist technologies for ion projection lithography (IPL) stencil maskmaking

2000 ◽  
Author(s):  
Mathias Irmscher ◽  
Joerg Butschke ◽  
Klaus Elian ◽  
Bernd Hoefflinger ◽  
Karl Kragler ◽  
...  
Keyword(s):  
Projection Lithography ◽  
Ion Projection Lithography

Reference plate manufacturing process for the ion projection lithography pattern lock system

2001 ◽  
Vol 57-58 ◽  
pp. 213-218
Author(s):  
F. Letzkus ◽  
J. Butschke ◽  
M. Irmscher ◽  
C. Reuter ◽  
R. Springer ◽  
...  
Keyword(s):  
Manufacturing Process ◽  
Projection Lithography ◽  
Ion Projection Lithography ◽  
Reference Plate
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