Two-dimensional scanning capacitance microscopy measurements of cross-sectioned very large scale integration test structures
1996 ◽
Vol 14
(1)
◽
pp. 426
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2013 ◽
Vol 21
(12)
◽
pp. 2358-2358
Keyword(s):
2009 ◽
Vol 17
(12)
◽
pp. C4-C4
Keyword(s):