Survey of high-voltage pulse technology suitable for large-scale plasma source ion implantation processes

1994 ◽  
Vol 12 (2) ◽  
pp. 854 ◽  
Author(s):  
William A. Reass
Keyword(s):  
Ion Implantation ◽  
High Voltage ◽  
Voltage Pulse ◽  
Large Scale ◽  
Plasma Source ◽  
High Voltage Pulse ◽  
Plasma Source Ion Implantation ◽  
Pulse Technology

Design of a large-scale plasma source ion implantation experiment

1993 ◽  
Author(s):  
B.P. Wood ◽  
D.J. Rej ◽  
I. Henins ◽  
J.T. Scheuer ◽  
W.A. Reass ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Large Scale ◽  
Plasma Source ◽  
Plasma Source Ion Implantation

A high voltage pulse power supply for metal plasma immersion ion implantation and deposition

2010 ◽  
Vol 81 (12) ◽  
pp. 124703 ◽  
Author(s):  
M. C. Salvadori ◽  
F. S. Teixeira ◽  
W. W. R. Araújo ◽  
L. G. Sgubin ◽  
N. S. Sochugov ◽  
...  
Keyword(s):  
Ion Implantation ◽  
High Voltage ◽  
Power Supply ◽  
Voltage Pulse ◽  
High Voltage Pulse ◽  
Pulse Power ◽  
Pulse Power Supply ◽  
Metal Plasma ◽  
Plasma Immersion Ion Implantation

Preferential sequence crushing of copper ore based upon high-voltage pulse technology

2019 ◽  
Vol 131 ◽  
pp. 398-406 ◽  
Author(s):  
Guanghui Yan ◽  
Zhenxing Zhang ◽  
Bo Zhang ◽  
GuangQing Zhu ◽  
Hao Yao ◽  
...  
Keyword(s):  
High Voltage ◽  
Voltage Pulse ◽  
High Voltage Pulse ◽  
Copper Ore ◽  
Pulse Technology

Using Transient Sheath Induced by Short High-voltage Pulse for Uniform Plasma Ion Implantation

2007 ◽  
Vol 46 (No. 35) ◽  
pp. L858-L860 ◽  
Author(s):  
Nicolas Holtzer ◽  
Hideo Sugai ◽  
Takao Saito ◽  
Eugen Stamate
Keyword(s):  
Ion Implantation ◽  
High Voltage ◽  
Voltage Pulse ◽  
High Voltage Pulse ◽  
Uniform Plasma
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