New characterization method of ion current-density profile based on damage distribution of Ga+ focused-ion beam implantation in GaAs

1993 ◽  
Vol 11 (6) ◽  
pp. 2420 ◽  
Author(s):  
G. Ben Assayag
Keyword(s):  
Density Profile ◽  
Current Density ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Ion Current ◽  
Damage Distribution ◽  
Current Density Profile ◽  
Ion Beam Implantation ◽  
Ion Current Density

scholarly journals Magnetically filtered Faraday probe for measuring the ion current density profile of a Hall thruster

2006 ◽  
Vol 77 (1) ◽  
pp. 013503 ◽  
Author(s):  
Joshua L. Rovey ◽  
Mitchell L. R. Walker ◽  
Alec D. Gallimore ◽  
Peter Y. Peterson
Keyword(s):  
Density Profile ◽  
Current Density ◽  
Ion Current ◽  
Hall Thruster ◽  
Current Density Profile ◽  
Ion Current Density

Time Resolved Studies of Focused Ion Beam Induced Tungsten Deposition

2002 ◽  
Vol 749 ◽  
Author(s):  
H. Langfischer ◽  
S. Harasek ◽  
H. D. Wanzenboeck ◽  
B. Basnar ◽  
E. Bertagnolli
Keyword(s):  
Current Density ◽  
Focused Ion Beam ◽  
Metal Layer ◽  
Ion Beam ◽  
Ion Current ◽  
Transformation Rate ◽  
Average Current Density ◽  
Time Resolved ◽  
Tungsten Hexacarbonyl ◽  
Ion Current Density

ABSTRACTIn this study we investigate the nucleation and growth mechanisms of tungsten films processed by focused ion beam (FIB) induced chemical vapor deposition. For our investigation we use a 50 keV Ga+ ion beam focused on the substrate target and tungsten hexacarbonyl (W(CO)6) as precursor gas. Mediated by the substrate the energy of the impinging ions leads to the decomposition of the tungsten hexacarbonyl molecules adsorbed on the substrate into volatile parts and nonvolatile residues forming a metal deposit. Time resolved FIB secondary electron microscope imaging in combination with atomic force microscopy reveal first the formation of isolated nuclei and further their coalescence finally resulting in the formation of a contiguous metal layer. Despite the local impacts of the ion beam within the irradiated area of the substrate the localization of the nucleation spots is neither correlated to the spot centers nor to the scan path of the ion beam. After formation, the nanoscale tungsten nuclei preserve their positions and typical shapes during further deposition. Only after merging the nuclei to a contiguous tungsten layer, a further regime of growth sets on which is characterized by deposition of tungsten on a tungsten surface. In this regime the deposition process is determined by the total ion dose and the average current density the samples are subjected to. In this regime, deposition yields up to 3.5 atoms per incident gallium ion are achieved. The contiguous layer quality is determined by Auger electron analysis. The measured growth data were interpreted by adopting the analytic Ruedenauer Steiger approach mainly incorporating ion current density, precursor gas transformation rate, and ion induced sputtering. As a result, the critical ion current density, where ion sputtering exceeds deposition, was identified by the model. Because the model shows excellent agreement with the measurement it should be suitable for further survey concerning focused ion beam process development.

Ion current density profile control of a scalable linear ion source and its application

2006 ◽  
Vol 77 (3) ◽  
pp. 03C107 ◽  
Author(s):  
F. Scholze ◽  
H. Neumann ◽  
M. Tartz ◽  
J. Dienelt ◽  
H. Schlemm
Keyword(s):  
Density Profile ◽  
Current Density ◽  
Ion Source ◽  
Ion Current ◽  
Profile Control ◽  
Current Density Profile ◽  
Ion Current Density

Current density profile characterization and analysis method for focused ion beam

2016 ◽  
Vol 155 ◽  
pp. 19-24 ◽  
Author(s):  
Yuval Greenzweig ◽  
Yariv Drezner ◽  
Shida Tan ◽  
Richard H. Livengood ◽  
Amir Raveh
Keyword(s):  
Density Profile ◽  
Current Density ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Analysis Method ◽  
Current Density Profile

Influence of Ion Current Density on the Surface Morphology of AZ31 Magnesium Alloy Irradiated by High-Intensity Pulsed Ion Beam

2011 ◽  
Vol 391-392 ◽  
pp. 868-871
Author(s):  
Peng Li ◽  
Y.X. Wang ◽  
L. Xue
Keyword(s):  
Magnesium Alloy ◽  
Current Density ◽  
Ion Beam ◽  
Surface Profile ◽  
Ion Current ◽  
Az31 Magnesium Alloy ◽  
Horizontal Wave ◽  
Surface Profiles ◽  
Surface Morphologies ◽  
Ion Current Density

HIPIB irradiation into AZ31 magnesium alloy is performed at ion current density of 100-300 A/cm2 with 1 shot. The surface morphologies and surface profiles of the irradiated AZ31 magnesium alloy samples are characterized by scanning electron microscopy (SEM) and profilometer, respectively. It is found that HIPIB irradiation leads to the formation of crater in local region of irradiated samples, and crater density increases with increasing ion current density. Both the surface roughness that reflects the vertical wave of surface profile and the mean spacing of surface profile irregularities that reflects the horizontal wave of surface profile increase as ion current density increases. These results are in agreement with the SEM observation on the irradiated surface.

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